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A kind of purification method of electronic grade hydrogen chloride

A purification method and hydrogen chloride technology, applied in the direction of chlorine/hydrogen chloride purification, chlorine/hydrogen chloride, chemical instruments and methods, etc., can solve the problems of high energy consumption and high cost, and achieve the effect of improving adsorption capacity and good adsorption capacity

Active Publication Date: 2019-07-12
ZHEJIANG BRITECH CO LTD
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0006] The purification of electronic-grade hydrogen chloride in the prior art mainly utilizes multi-stage separation processes such as rectification and distillation, and the dehydrogenation is mainly a low-temperature rectification process, which consumes a lot of energy and costs high

Method used

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  • A kind of purification method of electronic grade hydrogen chloride
  • A kind of purification method of electronic grade hydrogen chloride

Examples

Experimental program
Comparison scheme
Effect test

Embodiment 1

[0023] (1) Preparation of aluminum hydrogen resin adsorbent:

[0024] Add 100Kg D201 strong basic macroporous anion exchange resin in the 3000L reactor, the factory form is OH type, add 1500Kg deionized water, 10Kg sodium aluminum hydride NaALH 4 , then add 1Kg of 1-butyl-3-methylimidazolium tetrafluoroborate ionic liquid, soak at 20°C for 72 hours, filter, and then dry until the water content is less than 5ppm to obtain an aluminum hydrogen resin adsorbent;

[0025] (2) Dehydration:

[0026] The raw chemical grade hydrogen chloride is passed into the drying tower equipped with X-type molecular sieve desiccant for deep dehydration, and the water content after dehydration is 0.7ppm.

[0027] (3) refined

[0028] The dehydrated hydrogen chloride enters a 1000L adsorption tower equipped with 500L aluminum hydrogen resin adsorbent at a temperature of 40°C and a flow rate of 3BV / h to obtain electronic grade hydrogen chloride products. Product number B-1.

Embodiment 2

[0030] (1) Preparation of aluminum hydrogen resin adsorbent:

[0031] Add 100Kg D201 strong basic macroporous anion exchange resin into the 3000L reactor, the factory form is OH type, add 1000Kg deionized water, 5Kg sodium aluminum hydride NaALH 4 , then add 0.5Kg of 1-butyl-3-methylimidazolium tetrafluoroborate ionic liquid, soak at 10°C for 48h, filter, and then dry until the water content is less than 5ppm to obtain aluminum hydrogen resin adsorbent;

[0032] (2) Dehydration:

[0033] The raw chemical grade hydrogen chloride is passed into the drying tower equipped with X-type molecular sieve desiccant for deep dehydration, and the water content after dehydration is 0.8ppm.

[0034] (3) refined

[0035] The dehydrated hydrogen chloride enters a 500L adsorption tower equipped with 200L aluminum hydrogen resin adsorbent at a temperature of 20°C and a flow rate of 1BV / h to obtain electronic grade hydrogen chloride product, product number B-2.

Embodiment 3

[0037] (1) Preparation of aluminum hydrogen resin adsorbent:

[0038] Add 100Kg D201 strong basic macroporous anion exchange resin into the 5000L reactor, the factory form is OH type, add 2000Kg deionized water, 15Kg sodium aluminum hydride NaALH 4 , then add 2Kg of 1-butyl-3-methylimidazolium tetrafluoroborate ionic liquid, soak at 30°C for 240h, filter, and then dry until the water content is less than 5ppm to obtain an aluminum hydrogen resin adsorbent;

[0039] (2) Dehydration:

[0040] The raw chemical grade hydrogen chloride is passed into the drying tower equipped with X-type molecular sieve desiccant for deep dehydration, and the water content after dehydration is 0.5ppm.

[0041] (3) refined

[0042] The dehydrated hydrogen chloride enters a 1000L adsorption tower equipped with 500L aluminum hydrogen resin adsorbent at a temperature of 60°C and a flow rate of 5BV / h to obtain electronic grade hydrogen chloride product, product number B-3.

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Abstract

The invention relates to a method for purifying electron-grade hydrogen chloride. The method comprises the following steps: carrying out ion exchange between highly basic polystyrene macroporous ion exchange resin with sodium aluminum hydride NaAlH4 to generate an aluminum hydride resin adsorbent; loading 1-butyl-3-methylimidazolium tetrafluoroborate ionic liquid, so that the performances of adsorbing hydrogen, carbon dioxide and other impurities are improved.

Description

technical field [0001] The invention relates to a method for purifying hydrogen chloride, in particular to a method for purifying electronic-grade hydrogen chloride. Background technique [0002] With the rapid development of the microelectronics industry in the direction of large size, high integration, high uniformity and high integrity, there are new requirements for electronic grade hydrogen chloride, which is widely used in vapor phase polishing of single crystal silicon and corrosion of epitaxial frame. In addition to having a purity of more than 99.999%, it is also required that the content of organic impurities such as THC, H2O and metal ions of hydrogen chloride be as low as possible. Electronic grade hydrogen chloride is mainly used for high temperature vapor phase etching of silicon and gallium arsenide before epitaxial growth to remove sodium ions. In addition, high-purity hydrogen chloride is also used in metal surface chemical treatment, mixed gas for laser, f...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): C01B7/07
CPCC01B7/0718
Inventor 陈刚叶向荣张广第周井森张晓东王宁钱红东陈立峰花永紧郑九丽
Owner ZHEJIANG BRITECH CO LTD
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