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Two-dimensional expansion method for CVD monocrystal diamond

A technology of single crystal diamond and seed crystal, which is applied in the field of manufacturing single crystal diamond materials, can solve the problems of low expansion efficiency, cumbersome operation process, complicated three-dimensional expansion technology, etc., and achieve the effect of size expansion

Inactive Publication Date: 2016-10-12
WUHAN INSTITUTE OF TECHNOLOGY
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  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

The three-dimensional expansion technology of repeated growth on the top and side surfaces by flipping the crystal is very complicated, the actual operation process is particularly cumbersome, and the expansion efficiency is low

Method used

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  • Two-dimensional expansion method for CVD monocrystal diamond
  • Two-dimensional expansion method for CVD monocrystal diamond
  • Two-dimensional expansion method for CVD monocrystal diamond

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Embodiment Construction

[0022] The present invention will be further described below in conjunction with the embodiments and accompanying drawings.

[0023] As shown in Figure 3, the device for growing single crystal diamond adopted in the following embodiments of the present invention comprises a deposition chamber, a substrate holder, and a microwave generator; the deposition chamber 1 is composed of an upper metal flange, a lower metal flange and a compression The rectangular waveguide 5 is connected, and the compressed rectangular waveguide 5 is connected with the microwave generator; the deposition chamber 1 is provided with an air inlet and an air outlet; the center of the substrate holder is provided with a hole (or groove).

[0024] The deposition chamber 1 comprises a quartz glass tube, an upper metal flange, and a lower metal flange (constituting a chamber). The upper metal flange is located at the upper end of the quartz glass tube, and a rubber sealing ring is arranged between the upper me...

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Abstract

The invention relates to a manufacturing method for a monocrystal diamond material, especially to a two-dimensional expansion method for CVD monocrystal diamond. The two-dimensional expansion method is characterized by comprising the following steps: a, placing a seed crystal of monocrystal diamond into a substrate support with a hole in the center so as to allow the seed crystal of monocrystal diamond to be exposed, wherein the substrate support is made of metal molybdenum; b, putting the substrate support with the seed crystal of monocrystal diamond into a deposition chamber and carrying out vacuum-pumping on the deposition chamber; c, generating plasma by using a microwave plasma chemical vapor deposition method, i.e., introducing hydrogen and methane into the deposition chamber, adjusting gas flow, microwave power and air pressure and allowing gas in the deposition chamber to absorb microwave energy and excite and generate plasma, thereby allowing monocrystal diamond to grow on a top surface and four side surfaces at the same time and realizing two-dimensional expansion of monocrystal diamond; and d, carrying out peeling so as to obtain large-size monocrystal diamond. The method realizes two-dimensional growth of monocrystal diamond on a monocrystal diamond substrate via the microwave plasma chemical vapor deposition method, so the size of monocrystal diamond is enlarged.

Description

technical field [0001] The invention relates to a method for manufacturing a single crystal diamond material, in particular, the invention relates to a two-dimensional enlarging method of a single crystal diamond. Background technique [0002] Diamond has a band gap (5.45ev) and a high breakdown field strength (1.0×10 7 V / cm), high carrier mobility (electron 2.7×10 7 cm / s, hole 1.0×10 7 cm / s), high dielectric constant (5.7) and good thermal conductivity (22W / cm k, four times that of copper), as well as stable chemical properties, high hardness, wear resistance and It has the characteristics of strong radiation resistance and has a very wide range of uses. Large-sized CVD (Chemical-Vapor-Deposition: Chemical Vapor Deposition) single crystal diamond is especially suitable for manufacturing high-performance power electronic devices that can work at higher temperatures and harsh environments. It is a promising high-temperature, large-scale Power wide bandgap semiconductor ma...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): C30B25/20C30B29/04
CPCC30B25/20C30B29/04
Inventor 马志斌吴超黄宏伟张田田宋修曦
Owner WUHAN INSTITUTE OF TECHNOLOGY
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