Alignment mark and preparation method thereof, substrate, display panel and display device

Abstract

The invention relates to the technical field of display and provides an alignment mark and a preparation method thereof, a substrate, a display panel and a display device. The alignment mark comprises protecting walls and an alignment mark body used for being aligned with a mask plate. The alignment mark body is located in an internal section defined by the protecting walls. According to the alignment mark, the alignment mark body is used for being aligned with the mask plate, the alignment mark body is located in the internal section defined by the protecting walls, the difference between the density of patterns around the alignment mark body and the density of patterns in the center of a structural layer can be reduced due to the protecting walls, the deviation influence caused by etching fluid on the patterns of the alignment mark body in the etching process is lowered accordingly, therefore, the alignment precision between the mask plate and the structural layer can be improved, and the following alignment precision is improved.

Description

technical field [0001] The invention relates to the field of display technology, in particular to an alignment mark and a preparation method thereof, a substrate, a display panel, and a display device. Background technique [0002] At present, the flat panel display includes liquid crystal display (Liquid Crystal Display, LCD), organic light emitting diode display (Organic Light Emitting Diode, OLED), plasma display (Plasma Display Panel, PDP) and electronic ink display and so on. As a current-mode light-emitting device, OLED display is favored by many advantages such as thinness, active light emission, fast response speed, wide viewing angle, flexible substrate, rich colors, high brightness, low power consumption, high and low temperature resistance, etc. It is recognized in the industry as the third-generation display technology after LCD displays, and can be widely used in terminal products such as smart phones, tablet computers, and TVs. [0003] In the existing OLED di...

AI Technical Summary

Problems solved by technology

However, at present, due to the patterns formed by the structural layer, there are fewer structural figures at the edge of the structural layer. In processes such as etching, the density of the graphic patterns at the edge of the structural layer is less than that at the center of the structural layer. The distribution of etching solution in the edge area of ​​the structural layer and the central area of ​​the structural layer are not uniform, which affects the accuracy of the alignment marks formed at the edge of the structural layer, resulting in subsequent alignment deviations and even alignment anomalies

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