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Low-friction nanometer TaC-reinforced carbon-based composite film preparation method

A low-friction, thin-film technology, applied in gaseous chemical plating, metal material coating process, coating, etc., can solve the problems of self-lubricating field research and application, etc., to improve tribological properties, good stability, and preparation simple method effect

Inactive Publication Date: 2016-08-10
CENT SOUTH UNIV
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

However, the ceramic phase coating prepared in the previous research is mainly used in the field of anti-oxidation and anti-ablation, and the research and application in the field of self-lubrication has not yet been carried out.

Method used

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  • Low-friction nanometer TaC-reinforced carbon-based composite film preparation method
  • Low-friction nanometer TaC-reinforced carbon-based composite film preparation method
  • Low-friction nanometer TaC-reinforced carbon-based composite film preparation method

Examples

Experimental program
Comparison scheme
Effect test

Embodiment 1

[0030] Example 1: (C-TaC hard film with a TaC content of 92.3 wt.%)

[0031]A graphite plate with a length of 10cm and a width of 5cm is used as the deposition substrate. Before deposition, it is polished, chamfered, cleaned, and dried, and then placed in the constant temperature area of ​​a hot-wall chemical vapor deposition furnace. The furnace is sealed and vacuumed to below 100pa. , heat up to a temperature of 900~1200°C and keep warm. The chemical vapor deposition process adopted is as follows: the deposition temperature is 1100 °C, the deposition pressure is 500-600 Pa, the deposition time is 6 h, and the reaction gas system used is TaCl 5 -C 3 h 6 -Ar, where the flow rate of propylene is 0.1L / min, and the flow rate of carrier gas argon is 0.4L / min -1 , and pass into the hot wall CVD furnace with a constant gas ratio.

[0032] After deposition, the phase composition of the film mainly includes C phase (7.7 wt.%) and TaC phase (92.3 wt.%); the film is uniform and dens...

Embodiment 2

[0034] Example 2: (C-TaC hard film with TaC content of 86.4wt.% and 72.0wt.%)

[0035] Among them, the composition ratio of the first C-TaC composite film is TaC content 28.0wt%, C content 72.0wt%. 6h, the reaction gas system used is TaCl 5 -C 3 h 6 -Ar, wherein the flow rate of propylene is 1.2 L / min, and the flow rate of carrier gas argon is 0.4 L / min; and it is passed into the hot wall CVD furnace with a constant gas ratio.

[0036] The composition ratio of the second C-TaC composite film is TaC content 13.6wt%, C content 86.4wt%, the chemical vapor deposition process used is, the deposition temperature is 1100°C, the deposition pressure is 500-600Pa, and the deposition time is 6h , the reaction gas system used is TaCl 5 -C 3 h 6 -Ar, wherein the flow rate of propylene is 1.2L / min, and the flow rate of carrier gas argon is 0.2 L / min; and it is passed into the hot wall CVD furnace with a constant gas ratio and constant volume.

[0037] After deposition, the phase comp...

Embodiment 3

[0040] Example 3: (Comparison between C-TaC composite film and other films)

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Abstract

The invention discloses a low-friction nanometer TaC-reinforced carbon-based composite film preparation method. The preparation method comprises putting a graphite base into a chemical vapor deposition furnace, carrying out vacuum-pumping to pressure of 100pa or less, carrying out heating to a temperature of 900-1200 DEG C, carrying out thermal insulation, feeding a TaC15-Ar-C3H6 reaction gas system for preparing C and TaC into a reactor through Ar as carrying gas according to a TaCl5 carrying gas Ar flowing amount of 0.04-0.40L / min<-1> and a propylene flowing amount of 0.2-1.2L / min<-1>, and depositing C and TaC on the surface of the graphite base to obtain a C-TaC composite multilayer film which comprises nanometer TaC crystal grains coated with pyrolytic carbon and has layer number of 3-20, a mass fraction of 5.0-25.0% and thickness of 6-30 microns. The nanometer composite multilayer structure has the advantages of high hardness, low friction coefficient, high wear resistance, high thermal conductivity, low thermal expansion coefficient, good chemical stability and good oxidation resistance.

Description

technical field [0001] The invention relates to a preparation method of a low-friction coefficient nanometer TaC particle dispersion-reinforced C-based composite film, which is mainly used for light weight, small friction coefficient, less frictional heat, high strength, good thermal conductivity, impact resistance and vibration resistance. , anti-skid, self-lubrication and other characteristics of the service environment, suitable for the production of surface coating materials for tools and molds, and also very suitable for the surface of wearable parts such as gears, bearings and pistons with special requirements, so as to meet the requirements of the above components in harsh conditions. service requirements in the environment. Background technique [0002] Diamond-like amorphous carbon (DLC) films are a series of sp 2 and sp 3 The general term for the bonded amorphous carbon film has diamond-like properties, including: excellent physical and chemical properties, such ...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): C23C16/26C23C16/32
CPCC23C16/26C23C16/32
Inventor 陈招科熊翔吕东泽孙威王雅雷黄杰王馨爽
Owner CENT SOUTH UNIV
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