Humiture sensor
A technology of temperature and humidity sensors and temperature sensors, which is applied in the direction of instruments and measuring devices, can solve problems such as mutual interference, waste of computing resources, and difficult laying of wires, and achieve good consistency, small product size, and low power consumption. Effect
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[0009] A temperature and humidity sensor is characterized in that it includes a data acquisition unit, a control processing unit, a communication unit, and a receiving unit; the data acquisition unit includes a data acquisition unit composed of a plurality of temperature sensors and humidity sensors, and the sensor adopts a cantilever The beam capacitive temperature sensor and the interdigital capacitive humidity sensor comprise a semiconductor substrate, a lower dielectric layer, a lower metal layer, an intermediate dielectric layer, an intermediate metal layer, an upper dielectric layer, and a The upper metal interconnection line and moisture sensitive material on the upper surface of the layer, the data collected by the data acquisition unit are transmitted to the wireless communication module through the middleware adapter, and the control processing unit receives the voltage signal of the detection unit, converts it into a digital signal and stores it; The communication un...
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