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Alpha-beta scanning method for confocal microscopic system

A technology of confocal microscopy and scanning method, applied in the field of α-β scanning, can solve the problems of low measurement efficiency, inability to make full use of the effective field of view of the optical system, and difficulty in reliability, so as to improve measurement efficiency, prolong service life, and improve reliability. sexual effect

Inactive Publication Date: 2016-07-27
HARBIN INST OF TECH
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Problems solved by technology

[0003] The purpose of the present invention is to solve the problems that the confocal scanning method in the prior art cannot make full use of the effective field of view of the optical system, the measurement efficiency is low and the reliability is difficult to improve

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  • Alpha-beta scanning method for confocal microscopic system
  • Alpha-beta scanning method for confocal microscopic system
  • Alpha-beta scanning method for confocal microscopic system

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Embodiment Construction

[0020] The specific embodiment of the present invention is described in conjunction with accompanying drawing, a kind of α-β scanning method that is used for confocal microscope system of the present invention, such as Figure 4 shown, including the following steps:

[0021] (a) Use the host computer software to construct two sinusoidal signals: α signal and β signal, such as figure 2 As shown, it is used as the control signal of the galvanometer system;

[0022] (b) communicate with the data acquisition card through the host computer software, and output the α signal and the β signal constructed in the step (a) through the two channels of the data acquisition card respectively, so as to control the scanning motion of the galvanometer system;

[0023] (c) The galvanometric galvanometer system performs scanning motion according to the α signal and the β signal, and realizes the two-dimensional scanning of the scanning spot with concentric circle tracks. The scanning spot trac...

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Abstract

The invention relates to a confocal microscopic scanning method and discloses an alpha-beta scanning method for a confocal microscopic system to solve the problems that a confocal scanning method in the prior art can not fully utilize an effective field of view of an optical system, the measuring efficiency is low, and reliability is hard to improve.A signal alpha and a signal beta are constructed through upper computer software and sent into a streaming detection type galvanometer system through two channels of a data collecting card respectively to be taken as control signals of the streaming detection type galvanometer system; the streaming detection type galvanometer system conducts scanning according to the signal alpha and the signal beta, and two-dimensional scanning is finished for a scanning light spot according to a concentric circle track; scanning light spot track information is acquired through calculation; the streaming detection type galvanometer system and an axial micropositioner are controlled to achieve three-dimensional scanning measurement of a sample to be detected; the collected data is processed, and by combining the scanning light spot track, the three-dimensional shape of the sample to be detected is reconstructed.According to the method, the effective field of view of the optical system can be fully utilized, and the scanning field of view of the confocal microscopic system is enlarged to the maximum extent.

Description

technical field [0001] The invention relates to a confocal microscopic scanning method, in particular to an alpha-beta scanning method for a confocal microscopic system, and belongs to the technical field of optical confocal microscopy. Background technique [0002] At present, most of the confocal microscope systems use the galvanometer system to complete the two-dimensional plane scanning. The widely used scanning method is raster scanning. The advantage of the scanning method is that it is easy to implement, and it is easy to reconstruct the collected data. The disadvantage is that it is difficult to increase the scanning speed of the galvanometric galvanometer system. The shock will reduce the service life of the galvanometer, and it will be difficult to improve the reliability of the galvanometer system. At the same time, since the field of view of the optical system is circular, while the field of view of the raster scanning is square, the field of view of the raster ...

Claims

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Application Information

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IPC IPC(8): G01B11/24
CPCG01B11/24
Inventor 刘俭由小玉谭久彬
Owner HARBIN INST OF TECH
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