On-chip integrated arsenic sulfide microdisk cavity and manufacturing method thereof
A technology for integrating arsenic sulfide microdisk cavity and arsenic sulfide, which is applied in the optical field, can solve the problems of low quality factor of integrated arsenic sulfide microdisk cavity, and achieve the effect of improving quality factor and performance
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[0050] The present invention will be further described in detail below in conjunction with the accompanying drawings and embodiments. It should be understood that the specific embodiments described here are only used to explain the present invention, but not to limit the present invention. In addition, it should be noted that, for the convenience of description, only parts related to the present invention are shown in the drawings but not all content.
[0051] figure 1 It is a schematic cross-sectional view of an implementation of an on-chip arsenic sulfide microdisk cavity provided by an embodiment of the present invention. Such as figure 1 As shown, the on-chip integrated arsenic sulfide microdisk cavity provided by the embodiment of the present invention includes: a support structure 101 and a microdisk 102 .
[0052] Wherein, the microdisk 102 is located on the support structure 101 , and the size of the microdisk 102 is larger than that of the support structure 101 . ...
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