Area-array giant-magnetoresistance magnetic sensor and manufacturing method thereof

Abstract

The invention discloses an area-array giant-magnetoresistance magnetic sensor and a manufacturing method thereof. A data acquisition processing unit and a giant magnetoresistance array are included. The data acquisition processing unit comprises a power supply module, an address selector, a simulated front end and an analog-digital converter. The power supply module is connected to the giant magnetoresistance array through the address selector. The giant magnetoresistance array is connected to the analog-digital converter through a simulated front end module. The giant magnetoresistance array comprises 256 meandering-type-resistance-form giant-magnetoresistance magnetic sensors adopting a nanometer multilayer film structure and the sensors form a 16*16 area-array-form giant-magnetoresistance array. Based on a standard CMOS integrated circuit technology, an external data acquisition processing unit circuit is individually processed; after the external circuit processing is completed, the giant-magnetoresistance array is processed through two-step lithography. In the invention, the area-array giant-magnetoresistance magnetic sensors can realize accurate plane magnetic field high speed synchronization detection; miniaturization and integration degrees are high; a product technology is compatible and batch production is convenient.

Description

【Technical field】 [0001] The invention belongs to the field of sensing and detection, and in particular relates to an area array giant magnetoresistive magnetic sensor and a manufacturing method thereof. 【Background technique】 [0002] The magnetic field can be used as a carrier of various information, and it exists widely in all aspects of modern industrial society. Magnetic detection technology has become an important detection means. Magnetic sensors are widely used in modern industry and electrical and electronic products to obtain physical parameters such as current, position, and direction by measuring the intensity of the induced magnetic field. [0003] In the prior art, there are many different types of sensors that can be used to measure the magnetic field, such as Hall (Hall) elements, anisotropic magnetoresistance (AMR) elements, giant magnetoresistance (GMR) elements or tunnel junction giants. Magnetoresistive (TMR) elements are magnetic sensors that are sensi...

AI Technical Summary

Problems solved by technology

However, this array sensor has obvious shortcomings

The number of array elements of the sensor is only 8, and each array element is composed of a giant magnetoresistive chip and two strip-shaped alnico permanent magnets. The 8 sub-boards are welded on the ring PCB with the same radius and angle. The low degree of automation makes the sensor's use environment and scope of application very limited

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