Method and apparatus for preparing gas sensor

A gas sensor and gas technology, applied in the direction of measuring devices, instruments, scientific instruments, etc., can solve the problems of complex manufacturing process, high equipment price, and limited application, and achieve the goal of avoiding complex process, extensive engineering application value, and making up for response speed Effect

Active Publication Date: 2016-06-22
AECC COMML AIRCRAFT ENGINE CO LTD
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Problems solved by technology

However, the manufacturing process of one-dimensional nano-devices is cumbersome, and it needs to go through the process of nanowire transfer-positioning-glue removal-baking-exposure-development-fixing, and errors in each process will lead to failure.
At the same time, in the process of device preparation, it is necessary to rely on sophisticated semiconductor processing equipment, such as high-precision nanowire transfer equipment, electron beam exposure equipment, electronic evaporation equipment, etc. High price limits its application in engineering

Method used

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  • Method and apparatus for preparing gas sensor
  • Method and apparatus for preparing gas sensor
  • Method and apparatus for preparing gas sensor

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Embodiment Construction

[0045] The present invention will be described in detail below in conjunction with the accompanying drawings and specific embodiments. Note that the aspects described below in conjunction with the drawings and specific embodiments are only exemplary, and should not be construed as limiting the protection scope of the present invention.

[0046] In view of the fact that traditional one-dimensional nanostructured gas sensors are complicated to manufacture, the cost is high, and the performance of gas sensors with two-dimensional thin film structures is low, the present invention provides a simple, economical and controllable method based on nanoarrays (for example, ZnO nanoarrays) to prepare Gas sensor method. The method cleverly combines the macrostructure (gold wire) with the microstructure (ZnO nanoarray), and through a controllable structure design process, a nanoarray structure with a high specific surface area is obtained to improve the adsorption capacity of the nanostruc...

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Abstract

The present invention provides a method for preparing a gas sensor, the method is as follows: a nano wire array is grown on a metal wire substrate by use of a thermal evaporation process; the grown test-tube-brush-like nano-array structure is sensitized; and both ends of the grown test-tube-brush-like nano-array structure are etched to expose the metal wire substrate to be uses as an electrode of the gas sensor.

Description

technical field [0001] The invention relates to the field of gas sensors, in particular to a method and device for preparing a gas sensor. Background technique [0002] Gas sensor is an indispensable key equipment of modern aero-engine system. On the one hand, it provides various status signals for the FADEC system to ensure that it can accurately control the running state of the engine; on the other hand, it provides warning prompts for the pilot to remind the pilot to take emergency measures to reduce the impact of the failure. The performance of the gas sensor determines the safety of the engine to some extent. With the rapid development of the civil aircraft industry, the engine has higher and higher requirements for sensors, which not only require fast response and good stability of sensors, but also require sensors to develop in the direction of miniaturization, multi-function and intelligence. [0003] Due to its unique size effect, nanomaterials have functional pro...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G01N27/00
Inventor 孙杨慧
Owner AECC COMML AIRCRAFT ENGINE CO LTD
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