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Black phosphorus/molybdenum disulfide heterojunction-based photodetector

A technology of molybdenum disulfide and photodetector, which is applied in the field of photodetection, can solve the problems of small size, non-existence, wide spectrum, fast, low-noise response characteristics, etc., and achieve high detection bandwidth, improved sensitivity, and low noise The effect of current

Inactive Publication Date: 2016-06-15
UNIV OF ELECTRONICS SCI & TECH OF CHINA
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  • Abstract
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Problems solved by technology

[0004] The present invention provides a photodetector based on black phosphorus / molybdenum disulfide heterojunction in view of the above-mentioned deficiencies, which solves the problem that the device does not have wide spectrum, fast and low-noise response characteristics, and at the same time does not have compatibility with CMOS technology, volume Small, easy to integrate and responsive to problems with tunable spectral range

Method used

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  • Black phosphorus/molybdenum disulfide heterojunction-based photodetector

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Embodiment 1

[0019] figure 1 It is a structural schematic diagram of a photodetector based on black phosphorus / molybdenum disulfide heterojunction in an embodiment of the present invention.

[0020] Depend on figure 1 It can be seen that the photodetector based on the black phosphorus / molybdenum disulfide heterojunction provided by the present invention comprises a silicon dioxide substrate layer 1, a molybdenum disulfide layer 2 arranged on the silicon dioxide substrate layer 1, and a The upper surface is covered with a black phosphorus conductive layer 3. The black phosphorus conductive layer 3 and molybdenum disulfide 2 form a heterojunction structure. The black phosphorus conductive layer 3 is provided with a first electrode layer 4 and a second electrode layer 5. The first electrode The layer 4 and the second electrode layer 5 are arranged symmetrically on the conductive layer 3 of black phosphorus.

[0021] The black phosphorus conductive layer 3 described in the embodiment is a si...

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Abstract

The invention discloses a black phosphorus / molybdenum disulfide heterojunction-based photodetector, belongs to the technical field of photodetection and aims at solving the problems that a device does not have wide-spectrum, fast and low-noise response characteristics, does not have the compatibility with a CMOS process and is small in volume, easy to integrate and adjustable in response spectrum range. The black phosphorus / molybdenum disulfide heterojunction-based photodetector comprises a silicon dioxide substrate layer, wherein a molybdenum disulfide layer is arranged on the silicon dioxide substrate layer; a black phosphorus conductive layer covers the upper surface of the molybdenum disulfide layer; the black phosphorus conductive layer and the molybdenum disulfide layer form a heterojunctio structure; and a first electrode layer and a second electrode layer are arranged on the black phosphorus conductive layer. The black phosphorus / molybdenum disulfide heterojunction-based photodetector is used for achieving a wide-spectrum and ultrafast-response photodetector.

Description

technical field [0001] The invention discloses a photodetector based on black phosphorus / molybdenum disulfide heterojunction, which is used to realize a photodetector with wide spectrum and ultrafast response, and belongs to the field of photodetection technology. Background technique [0002] The applicable spectral range and detection bandwidth of traditional photodetectors based on group IV and III-V semiconductor materials (such as silicon and gallium arsenide) are generally restricted by the energy band gap and carrier transit time of the material itself, so It is difficult to realize optical modulators with wide spectrum and ultrafast response. With the rapid development of science and technology, the requirements for device integration are getting higher and higher, and the device size needs to be continuously reduced. Devices based on traditional materials for photodetectors are approaching the limit. In recent years, more and more attention has been paid to the res...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): H01L31/109H01L31/0264
CPCH01L31/109H01L31/0264
Inventor 陆荣国叶胜威田朝辉寿晓峰陈德军张尚剑刘永
Owner UNIV OF ELECTRONICS SCI & TECH OF CHINA
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