Windowing terminal point determining method for solar energy cell laser back electrode window
一种终点判断、背电极的技术,应用在太阳能电池领域,能够解决激光背电极窗口开窗工艺难直接应用于大规模电池生产、激光背电极窗口开窗工艺工艺难度、无法达到刻蚀绝缘钝化层等问题,达到开窗终点判断方法简单易行、缩短检测时间、成本低的效果
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[0026] The present invention will be further described below in conjunction with the accompanying drawings and specific embodiments.
[0027] The method for judging the end point of window opening of the solar cell laser back electrode window in the embodiment of the present invention includes the following steps:
[0028] Step 1. Select a cell from the same batch of cells as a sample sample. A back passivation layer with a uniform thickness is deposited on the back of the cell sample. In this example, the back passivation layer is a silicon nitride layer.
[0029] Step 2. In an oxygen-free environment, use a pulsed laser with the same wavelength and pulse frequency to etch the back of the cell sample 20 times. The area of the first etching is 20*100mm 2 , the second etching area is 19*100mm 2 , and so on, the area of the 10th etching is 100mm 2 , the area of the second etching is within the area of the first etching, the area of the third etching is within the are...
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