Single electrode regulated ion triode with diverging /convergent nano channel structure, and characteristic adjusting method thereof

Abstract

The invention relates to a single electrode regulated ion triode with a diverging / convergent nano channel structure. The single electrode regulated ion triode comprises a substrate, an upper cover plate, regulating electrodes, driving electrodes, an insulating layer, and liquid storage pools; one driving electrode, the insulating layer, one liquid storage pool, the substrate, the other liquid storage pool, the insulating layer, and the other driving electrode are arranged from the front to the back successively; one regulating electrode, the insulating layer, the substrate, the insulating layer, and the other regulating electrode are arranged from the left to the right successively; the upper end surface of the substrate is provided with a diverging / convergent nano channel with a width of nanometer scale, and the single electrode regulated ion triode is penetrated by the diverging / convergent nano channel from the front to the back; and the upper cover plate used for covering the diverging / convergent nano channel is arranged on the substrate. The invention also relates to a characteristic adjusting method of the single electrode regulated ion triode with a diverging / convergent nano channel structure. The single electrode regulated ion triode is simpler in structure, is lower in cost, and is more convenient to prepare; real-time regulating of triode breakover current can be realized; and application prospect is promising. The invention belongs to the technical field of ion triode.

Description

technical field [0001] The invention relates to an ion triode, in particular to an ion triode with a diverging / converging nano flow channel structure and a method for adjusting its characteristics. Background technique [0002] Mass transport at the microscale, especially fluid flow properties in microchannels and porous matrices, and enhanced heat and mass transport have received extensive attention. In recent years, with the development of MEMS (Micro-Electro-Mechanical Systems) technology, the preparation and application of nanostructures have received extensive attention. For example, Lu et al. used nanoimprint technology to prepare ultrafine (~4nm) Nb (niobium) wires for superconductivity testing; H.Yu et al. and David.C et al. conducted research on nanosensors applied to the study of biological macromolecules. The prepared nanosensor has the characteristics of small size, high compatibility with modern CMOS devices, and strong concentration sensitivity. Among them, n...

AI Technical Summary

Problems solved by technology

However, the electrodes of the nanofluidic system are usually directly coated on the surface of the substrate by PVD or CVD (physical vapor deposition or chemical vapor deposition), and the selection of the coating area in a small area puts forward high requirements for the process, and needs to be increased. Masking, cleaning, etc. steps

The above analysis shows that the existing ion triode implementation methods either need to use multiple control electrodes, or require a relatively difficult manufacturing process, and there are certain disadvantages

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