Atom generator capable of improving atomic beam density
A technology of atomic beams and generators, applied in the field of atomic generators, to achieve the effects of reducing damage, concentrating energy, and facilitating the processing of workpieces
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[0029] In order to make the object, technical solution and advantages of the present invention clearer, the present invention will be further described in detail below in conjunction with the accompanying drawings and embodiments. It should be understood that the specific embodiments described here are only used to explain the present invention, not to limit the present invention. In addition, the technical features involved in the various embodiments of the present invention described below can be combined with each other as long as they do not constitute a conflict with each other.
[0030] refer to Figure 1 to Figure 4 , an atom generator capable of increasing the density of atomic beams, comprising a vacuum flange 6, a gas circuit assembly, a heating device, and a thermal insulation cooling device, wherein,
[0031]The gas circuit assembly includes a gas supply source 1, a vacuum fine-tuning valve 2, a gas introduction flange 3, a gas supply pipe 15, a ceramic sleeve 14 ...
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