Controllable array nano wire solar battery and preparation method thereof
A technology of solar cells and nanowires, which is applied in the field of solar cells, can solve the problems of difficult realization of controllable array nanowire solar cells and poor controllability, and achieve the effects of low cost, expanded effective absorption range, and simple process
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[0046] The preparation method of the controllable array nanowire solar cell of this embodiment comprises the following steps:
[0047] 1) Select the crystal plane with the fastest growth rate in the semiconductor material as the substrate:
[0048] The growth rate of wurtzite GaN along the [0001] direction is much faster than that along the and For the growth rate in the direction, the (0001) plane GaN is selected as the substrate, so that [0001] is the surface normal direction of the substrate, which is conducive to the growth of nanowires along the surface normal direction of the substrate.
[0049] 2) Pre-grow an N-type doped layer on the substrate:
[0050] Si is used for N-type doping at 1300°C, and the doping concentration is 5×10 on the (0001) plane GaN substrate 1 18 cm -3 The N-type doped layer 2 has a thickness of 1 μm, such as figure 1 shown. Atomic force microscope AFM test shows that the surface of N-type GaN has atomic level flatness.
[0051] 3) Accordi...
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