A MEMS electrothermal actuator and its manufacturing process

Abstract

The invention relates to a MEMS electrothermal actuator and its manufacturing process, which solves the problem of independent processing and realizes small working voltage, large deformation, small power consumption and fast response. The electrothermal actuator is a cantilever beam, and the beam (2) includes an upper layer (7), a middle layer (5), a lower layer (3), an adhesive layer (4) and an insulating layer (6), and the thermal expansion coefficients of the upper layer material and the lower layer material are different , the middle layer (5) is a heating layer, the adhesive layer (4) is located between the middle layer (5) and the lower layer (3), the insulating layer (6) covers the upper surface of the middle layer (5), on the insulating layer (6) Embedded with two electrodes, the two electrodes are respectively in contact with the side surfaces of both ends of the "U"-shaped upper part of the heating layer, and the two electrodes are integrated with the upper layer (7), and the bottom of the lower layer at the fixed end of the beam is the base layer.

Description

technical field [0001] The invention belongs to the technical field of MEMS, and in particular relates to a MEMS electrothermal actuator and a manufacturing process thereof. Background technique [0002] MEMS (Micro electro mechanical Systems) is an industrial technology that integrates microelectronics technology and mechanical engineering, and its operating range is in the micron range. The material of the existing MEMS electrothermal actuator is usually Cu-SiO 2 , Al-SiO 2 or Au-SiO 2 Several kinds. For the existing MEMS electrothermal actuator manufacturing process, a dedicated MEMS production line is used abroad. In China, MEMS electrothermal actuators are mainly processed on the integrated circuit process line. Since the MEMS electrothermal actuator is processed at the same time as the integrated circuit, most integrated circuit process lines are not compatible with copper and gold. The heating layer material in MEMS electrothermal actuators usually uses polysilic...

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Problems solved by technology

[0003] The purpose of the present invention is to provide a MEMS electrothermal actuator and its manufacturing process, which solves the technical problem of independent processing of the MEMS electrothermal actuator, and realizes that the working voltage of the MEMS electrothermal actuator is small and the working deformation in the energized state Large, low power consumption and fast response

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