Quartz crystal resonance sensor welded by using low-temperature glass solder and preparation method of quartz crystal resonance sensor

A low-temperature glass solder, quartz crystal oscillator technology, applied in the direction of using electric/magnetic devices to transmit sensing components, instruments, measuring devices, etc., can solve the problems of low sensitivity, unusable test conditions, low quality factor, etc., to achieve high sensitivity, Avoid laser thermal effects, high quality factor effects

Inactive Publication Date: 2016-01-20
HARBIN INST OF TECH
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

[0006] The purpose of the present invention is to solve the problem that the existing atomic force microscope is based on the force sensor of the micro-cantilever structure. The force sensor of the micro-cantilever structure requires a huge light detection system, has low quality factor, low sensitivity and cannot be used in extreme test conditions. problem, and provide a kind of quartz crystal oscillator sensor and its preparation method using low-temperature glass solder soldering

Method used

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  • Quartz crystal resonance sensor welded by using low-temperature glass solder and preparation method of quartz crystal resonance sensor
  • Quartz crystal resonance sensor welded by using low-temperature glass solder and preparation method of quartz crystal resonance sensor
  • Quartz crystal resonance sensor welded by using low-temperature glass solder and preparation method of quartz crystal resonance sensor

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specific Embodiment approach 1

[0025] Embodiment 1: This embodiment is a quartz crystal oscillator sensor welded by low-temperature glass solder. Two or four quartz crystal oscillator cantilevers with the same size and shape are welded together by low-temperature glass solder.

specific Embodiment approach 2

[0026] Embodiment 2: The difference between this embodiment and Embodiment 1 is that the low-temperature glass solder is low-temperature sealing glass beads, and the grade is FM-13. Others are the same as the first embodiment.

[0027] The low-temperature sealing glass beads FM-13 described in this embodiment were purchased from Beijing Tianli Chuang Glass Technology Development Co., Ltd.

specific Embodiment approach 3

[0028]Specific embodiment three: this embodiment is that when the quartz crystal oscillator sensor welded by low-temperature glass solder is welded together by low-temperature glass solder, two quartz crystal oscillator cantilevers with the same size and shape are welded together, and it is completed according to the following steps: The two quartz crystal oscillators with the same size and shape are respectively the first quartz crystal oscillator and the second quartz crystal oscillator. The first quartz crystal oscillator and the second quartz crystal oscillator are vertically fixed on the welding table respectively, and the first quartz crystal oscillator is made The cantilever A1 arm and the first cantilever B1 arm of the second quartz crystal oscillator are at the same height, the second cantilever A2 arm of the first quartz crystal oscillator is at the same height as the second cantilever B2 arm of the second quartz crystal oscillator; The angle formed by the top of the ...

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Abstract

The invention relates to a sensor and a preparation method thereof, in particular, a quartz crystal resonance sensor welded by using low-temperature glass solder and a preparation method of the quartz crystal resonance sensor. An existing atomic force microscope is a micro cantilever structure-based force sensor, and the micro cantilever structure-based force sensor needs a huge optical detection system, and the quality factor and sensitivity of the micro cantilever structure-based force sensor are low, and as a result, the micro cantilever structure-based force sensor cannot be applied to extreme test conditions, while, with the quartz crystal resonance sensor of the invention adopted, the above situation can be avoided. According to the quartz crystal resonance sensor welded by using the low-temperature glass solder, two or four identically-sized-and-shaped quartz crystal resonance cantilevers are welded together through the low-temperature glass solder. The preparation method of the quartz crystal resonance sensor includes the following steps that: two or four identically-sized-and-shaped quartz crystal resonators are vertically fixed on a welding table; melt low-temperature glass solder is added at welding seams through electric soldering iron; and the two or four identically-sized-and-shaped quartz crystal resonators are welded together at 320 to 375 DEG C, so that the quartz crystal resonance sensor can be obtained. With the preparation method, a quartz crystal resonance sensor can be obtained.

Description

technical field [0001] The invention relates to a sensor and a preparation method. Background technique [0002] At present, as an important analytical instrument for characterizing the surface structure and performance of materials, the atomic force microscope has been widely used in research experiments on various nano-related subjects in semiconductors, nano-functional materials, biology, chemical industry, food, pharmaceutical research and scientific research institutes. and other fields. The atomic force microscope has many advantages, such as providing a true three-dimensional surface map, and most importantly, it has no special requirements for the sample and does not need to be conductive, so it is more widely applicable. However, with the development of material science, simply measuring the surface morphology of materials can no longer meet the needs of characterizing material properties at the nanometer scale. Other information, thus multi-frequency atomic force...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G01D5/12G01Q60/24
Inventor 郝立峰彭平王荣国赫晓东
Owner HARBIN INST OF TECH
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