A kind of electromagnetic mems vibration energy harvester and preparation method thereof

Abstract

The invention discloses an electromagnetic MEMS vibration energy harvester and a preparation method thereof. After preparing grooves and respective inductance line layers on two substrates, the two substrates are combined so that the grooves are formed to accommodate The cavity of the moving permanent magnet enables the respective inductance lines to be connected in a bridging manner to form a spiral inductance. In the vibration environment, the vibration pickup structure of the electromagnetic energy harvester can move freely in the cavity, which is a non-resonant vibration pickup structure. Compared with the resonant vibration pickup structure in the traditional energy electromagnetic harvester, its motion The case is less affected by the frequency of environmental vibrations and can respond to environmental vibrations in different directions. No matter how the vibration frequency and vibration direction change, the energy harvester of the present invention can efficiently collect vibration energy and convert it into electrical energy, so it has high energy collection efficiency, and has the advantages of low manufacturing cost and good consistency.

Description

technical field [0001] The invention relates to an energy harvester for collecting vibration energy in the environment and a preparation method thereof, in particular to an electromagnetic vibration energy harvester based on MEMS (Micro-Electro-Mechanical System, Micro-Electro-Mechanical System) technology and a preparation method thereof. Background technique [0002] The Internet of Things has broad application prospects in the fields of intelligent transportation, medical health, environmental monitoring, public security, national defense and military affairs. my country has vigorously promoted the Internet of Things as a strategic industry. The Internet of Things includes many wireless sensor nodes with the same or different functions, and the nodes communicate with each other and work together. Micro-energy technology is responsible for providing power to sensor nodes and is one of the key technologies for the development of the Internet of Things. At present, micro en...

AI Technical Summary

Problems solved by technology

In order to improve the efficiency of energy collection, the electromagnetic energy harvester is required to work in a resonance state, that is, the natural frequency of the vibration pickup structure in the collector is consistent with the vibration frequency in the external environment, but the vibration in the environment has many and variable frequency components ( frequency bandwidth), therefore, it is difficult for the energy harvester to work in a resonant state in practice, and its energy collection efficiency is low; in addition, electromagnetic energy harvesters can often only collect vibration energy in a single direction, when working in the vibration direction In a randomly changing environment, the vibration energy it can collect is very limited, which further limits its energy collection efficiency

Images