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Graphene characterization method

A graphene and characterization technology, applied in the field of graphene material characterization, can solve the problems of difficult characterization, low repeatability, and high cost, and achieve the effect of large characterization range, high repeatability, and reduced characterization cost.

Active Publication Date: 2015-11-04
SHANGHAI INST OF MICROSYSTEM & INFORMATION TECH CHINESE ACAD OF SCI
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  • Application Information

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Problems solved by technology

[0005] In view of the shortcomings of the prior art described above, the purpose of the present invention is to provide a graphene characterization method, which is used to solve the relatively difficult, low repeatability, and high cost of the characterization of graphene surface damage in the prior art The problem

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Embodiment 1

[0036] see figure 1 and figure 2 , the invention provides a graphene characterization method.

[0037] Firstly, a graphene single crystal grown directly on a copper substrate by chemical vapor deposition (CVD), such as figure 1 Shown is an optical microscope image of a single crystal of graphene on a copper substrate. The points pointed by the black arrows in the figure are individual graphene single crystals, including a single hexagonal graphene single crystal and two connected hexagonal graphene single crystals, which are distributed in different positions on the copper substrate and do not form continuous graphene. membrane.

[0038] Then put the graphene single crystal together with the copper substrate under it into FeCl with a mass concentration of 1g / L 3 In the solution, keep it for 1 hour, so that the Cu substrate reacts properly. If the reaction time is too short, the ideal observation morphology will not be achieved, and if the reaction time is too long, the g...

Embodiment 2

[0042] see Figure 3 to Figure 5 , the invention provides a graphene characterization method.

[0043] Firstly, a graphene single crystal grown directly on a copper substrate by chemical vapor deposition (CVD), such as image 3 Shown is an optical microscope image of a single crystal of graphene on a copper substrate. The points pointed by the black arrows in the figure are individual graphene single crystals, and some graphenes are formed by connecting two or three small-sized graphene single crystals.

[0044] It should be pointed out that, image 3 The light-colored fringes in the area indicated by the dashed box in the middle are the fringes of the copper substrate itself, rather than the graphene single crystal wrinkle or breakage.

[0045] Then the graphene single crystal on the copper substrate is oxidized in the air, so that the folds appear damaged, such as Figure 4 As shown, it is shown as an optical microscope picture of a graphene single crystal on a copper su...

Embodiment 3

[0049] Replace the copper substrate in Embodiment 1 or Embodiment 2 with an insulating substrate, such as silicon dioxide, hexagonal boron nitride, cubic boron nitride, etc., and replace the corrosion solution with the corrosion solution of the corresponding material, using basically the same The method characterizes graphene and finds the damaged part of graphene.

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Abstract

The invention provides a graphene characterization method. The method at least includes the following steps that graphene formed on a substrate is provided, the graphene and the substrate below the graphene are put into a corrosive solution to be soaked for the preset time, then the graphene and the substrate are taken out, the substrate is placed under a microscope, the surface topography of the graphene on the substrate is observed, and the damage condition of the surface of the graphene is judged according to the corrosive degree of the substrate below the graphene. According to the graphene characterization method, whether microsize damage exists on the surface of the graphene or not can be checked through the low-magnification microscope, the characterization range is large, the repeatability is high, the method is easy to implement, the characterization cost can be lowered effectively, and characterization efficiency is improved.

Description

technical field [0001] The invention belongs to the field of characterization of graphene materials, and relates to a characterization method of graphene. Background technique [0002] Since two scientists Andre Geim and Konstantin Novoselov published the first paper on graphene in 2004, graphene has stirred up huge waves in the scientific community, and its appearance is expected to trigger a new round of revolution in the field of modern electronic technology. Graphene is made of sp 2 The hexagonal honeycomb two-dimensional inorganic crystal material composed of hybridized carbon atoms (A.K.Geim, K.S. Novoselov, Nature Materials, 2007, 6, 183-191) has only one carbon atom layer, and the thickness is only 0.335nm. Graphene has many superior properties, such as high light transmittance, high electron mobility, high current density, high mechanical strength, easy modification and so on. Because of these characteristics, it is recognized as an ideal material for manufacturin...

Claims

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Application Information

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IPC IPC(8): G01N21/88G01N1/32
Inventor 张燕辉于广辉陈志蓥王斌隋妍萍张浩然张亚欠李晓良
Owner SHANGHAI INST OF MICROSYSTEM & INFORMATION TECH CHINESE ACAD OF SCI
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