Short wave infrared multichannel integrated spectral assembly

Abstract

The invention discloses a short wave infrared multichannel integrated spectral assembly. The short wave infrared multichannel integrated spectral assembly includes a high length-breadth ratio InGaAs linear array photosensitive chip, a readout circuit, a transition electrode plate, a temperature measuring resistor, a semiconductor refrigerating device, a multichannel digital optical splitter, a window, a metal pipe shell and a cover plate; the multichannel digital optical splitter is adopted as an optical splitting element of a miniature spectrometer and is directly fixed to the high length-breadth ratio InGaAs linear array photosensitive chip through edge metalized welding, so as to be integrated in the detector assembly. According to the short wave infrared multichannel integrated spectral assembly adopted, the photosensitive element of the InGaAs linear array photosensitive chip is of a high length-breadth ratio structure, and therefore, the signal-to-noise ratio of a spectral test can be improved; according to the multichannel digital optical splitter, fine adjustment and control of spectra can be realized on a single chip, and spectral noises in each channel, crosstalk between the channels and stray light outside the channels can be inhibited; and with the detector assembly adopted, detection of a plurality of spectral channels can be realized, and the structure of the miniature spectrometer can be simplified, and the reliability and stability of the instrument can be improved, and the weight of the instrument can be decreased.

Description

technical field [0001] The invention relates to an InGaAs detector component, in particular to an InGaAs detector component integrated with a multi-channel digital beam splitter used in a miniature spectrometer. Background technique [0002] Miniature spectrometers have a wide range of application requirements in agriculture, food, industry and other fields. They are ideal instruments for on-site quality inspection and on-line inspection. . The short-wave infrared InGaAs detector has the advantages of uncooled room temperature operation, high detection rate and good uniformity in the 0.9 μm ~ 1.7 μm band, and has become an ideal choice for miniature spectrometers. Micro-spectrometers based on short-wave infrared InGaAs detectors usually adopt the following two technical solutions: (1) use InGaAs unit detectors, and scanning stepping devices, gratings, mirrors, etc. to achieve spectral measurement. Its advantage is low cost, and its disadvantage is that there are moving par...

AI Technical Summary

Problems solved by technology

Its advantage is low cost, and its disadvantage is that there are moving parts inside the instrument, which affects the long-term stability and reliability of the instrument

(2) Using InGaAs linear focal plane detector components, gratings, mirrors, etc., the instrument is an all-solid-state spectroscopic system, its stability and reliability are greatly improved, and the integration level of the instrument needs to be further improved

[0003] With the improvement of optical design capabilities and processing capabilities, it is possible to realize a single-chip multi-channel digital optical splitter in the 0.9μm-1.7μm band with the existing technology

Images