Adaptive adjustment method based on multi-degree-of-freedom adjustment mechanism for grinding and polishing workpieces

Abstract

The invention discloses a self-adaptive adjusting method based on a multi-degree-of-freedom adjusting mechanism of grinded / polished workpieces. The parallelism of upper and lower surfaces of the workpieces is measured; the surfaces of classification polishing discs are finished; an image acquiring analysis system acquires images of the surfaces of the classification polishing discs, and generates three-dimensional topography data of the surfaces of the classification polishing discs; meanwhile, the workpieces with fixed gestures are contacted with the rotating classification polishing discs; a high-precision three-dimensional pressure sensor system acquires force stressed on the workpieces; the surface topography characteristics of the classification polishing discs are obtained by using the force; two surface topography data are synthesized to plan workpiece machining poses so as to generate workpiece pose conversion data; and the workpiece machining positions and gestures are controlled according to the generated workpiece pose conversion data. The method can effectively improve the parallelism of the upper and lower surfaces of the workpieces, adjusts the workpiece space poses in real time, and guarantees constant contact pressure in workpiece machining to obtain the workpieces with smooth and nondestructive surfaces and good shape surface precision.

Description

Technical field [0001] The invention relates to the field of precision and ultra-precision processing, and more specifically, to an adaptive adjustment method based on a multi-degree-of-freedom adjustment mechanism of a grinding and polishing disc. Background technique [0002] At present, with the continuous development of the semiconductor industry and optical industry, the surface of precision workpieces such as silicon wafer surface and optical mirror surface must be absolutely flat, the upper and lower surfaces are absolutely parallel, and there are no defects such as protrusions and poor flatness. Due to the limitations of the current processing technology, the surface of the composite elastic graded grinding and polishing plate used to process precision workpieces cannot be absolutely flat, and the upper and lower surfaces cannot be absolutely parallel. The composite elastic graded grinding and polishing disc is a kind of grinding and polishing disc with a flexible materia...

AI Technical Summary

Problems solved by technology

[0003] The purpose of the present invention is to solve the problem that the upper and lower surfaces of the workpiece itself are not parallel and the surface flatness of the composite elastic polishing disc is poor after repairing the disc. The present invention proposes an adaptive adjustment method based on a multi-degree-of-freedom adjustment mechanism for grinding and polishing workpieces, which has effective Improve the parallelism of the upper and lower surfaces of the workpiece, adjust the spatial posture of the workpiece in real time, and ensure that the contact pressure of the workpiece remains constant during processing, so as to obtain a workpiece with smooth surface without damage and good surface accuracy

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