Environment-friendly sapphire film deplating solution and using method thereof
A deplating solution and sapphire technology, applied in the chemical industry, can solve the problems of incomplete deplating, deplating solution failure, substrate scrapping, etc., achieve strong permeability and complexation effect, save processing time, and deplating short time effect
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Embodiment 1
[0039] Dissolve 150g of sodium hydroxide, 50g of sodium ethylenediaminetetraacetate, and 100g of sodium phosphate in 700mL of deionized water, stir to dissolve completely, set the volume to 1L, and cool for later use.
[0040] Fully immerse the sapphire lens with AR film and AF film in the obtained deplating solution, heat to 100°C and soak for 25 minutes: the AF film can be completely removed in 10 minutes, and the AR film can be completely removed in 20 minutes. Rate ≥ 10MΩ·cm, the same below) After ultrasonic cleaning for 5 minutes, dry at 100°C for 5 minutes. After the dried sapphire lens is tested by SEM, it can be seen that there is no corrosion to the sapphire surface, no residue on the surface film, and no effect on the size of the sapphire lens.
Embodiment 2
[0042] Dissolve 160g of potassium hydroxide, 40g of potassium edetate, and 200g of borax in 600mL of deionized water, stir to dissolve completely, set the volume to 1L, and cool for later use.
[0043] Fully immerse the sapphire lens with AR film and AF film in the obtained deplating solution, soak at 100°C for 20 minutes: the AF film layer can be completely removed in 6 minutes, the AR film layer can be completely removed in 15 minutes, and cleaned by pure water ultrasonic cleaning for 8 minutes Afterwards, dry at 100°C for 6 minutes. After the dried sapphire lens is tested by SEM, it can be seen that there is no corrosion to the sapphire surface, no residue on the surface film, and no effect on the size of the sapphire lens.
Embodiment 3
[0045] Dissolve 150g of sodium hydroxide, 15g of sodium gluconate, 45g of sodium ethylenediaminetetraacetate, and 100g of sodium phosphate in 700mL of deionized water, stir to dissolve completely, set the volume to 1L, and cool for later use.
[0046] Fully immerse the sapphire lens with AR film and AF film in the obtained deplating solution, heat to 100°C and soak for 25 minutes: the AF film layer can be completely removed in 15 minutes, and the AR film layer can be completely removed in 25 minutes. Clean it with pure water ultrasonic After 10 minutes, dry at 120°C for 3 minutes. After the dried sapphire lens is tested by SEM, it can be seen that there is no corrosion to the sapphire surface, no residue on the surface film, and no effect on the size of the sapphire lens.
[0047] In summary, the environment-friendly sapphire film deplating solution of the present invention is simple to prepare, has good deplating effect, simple use method, convenient follow-up treatment, non-...
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