Excimer laser

An excimer laser and seed technology, applied in the laser field, can solve the problems of changing the initial polarization state of the seed light and failing to achieve mutual phase compensation

Active Publication Date: 2015-09-23
RAINBOW SOURCE LASER RSLASER
View PDF6 Cites 0 Cited by
  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

It can be seen from the calculation of the phase change that the components of the currently disclosed optical path transmission structure basically cannot realize the phase mutual compensation effect, so the seed l...

Method used

the structure of the environmentally friendly knitted fabric provided by the present invention; figure 2 Flow chart of the yarn wrapping machine for environmentally friendly knitted fabrics and storage devices; image 3 Is the parameter map of the yarn covering machine
View more

Image

Smart Image Click on the blue labels to locate them in the text.
Viewing Examples
Smart Image
  • Excimer laser
  • Excimer laser
  • Excimer laser

Examples

Experimental program
Comparison scheme
Effect test

Embodiment Construction

[0027] In order to make the object, technical solution and advantages of the present invention clearer, the present invention will be described in further detail below in conjunction with specific embodiments and with reference to the accompanying drawings.

[0028] The present invention provides an excimer laser, comprising a seed cavity, an amplification cavity and an optical path transmission structure, the seed cavity is used to output the seed laser, the amplification cavity is used to amplify the energy of the seed laser, and the optical path transmission structure is used to guide the transmission of the laser light, Wherein, the optical path transmission structure includes a first triangular prism, a second triangular prism and a third triangular prism. The present invention realizes mutual compensation of the phase difference between P light and S light by adopting special angle triangular prisms and adopting a special placement method for the triangular prisms, so tha...

the structure of the environmentally friendly knitted fabric provided by the present invention; figure 2 Flow chart of the yarn wrapping machine for environmentally friendly knitted fabrics and storage devices; image 3 Is the parameter map of the yarn covering machine
Login to view more

PUM

No PUM Login to view more

Abstract

The invention discloses an excimer laser, comprising a seed cavity, an amplifying cavity and a light path transmission structure. The seed cavity is used for outputting seed laser; the amplifying cavity is used for amplifying the energy of the seed laser; the light path transmission structure is used for guiding the transmission of the laser, wherein the light path transmission structure comprises a first triangular prism, a second triangular prism and a third triangular prism. By adopting triangular prisms with special angles and special placing manners to the triangular prisms, the excimer laser of the invention could achieve mutual compensation of phase difference of a P light and an S light so that the light path transmission structure will not generate additional phase difference to achieve the goal of enabling the polarization state of the laser which is finally output and the polarization state of the seed laser output from a discharging cavity to be consistent and holding the stability of the polarization states of the laser.

Description

technical field [0001] The invention belongs to the technical field of lasers, in particular to an excimer laser. Background technique [0002] With the gradual reduction of lithography feature size and the increase of numerical aperture in the current integrated circuit manufacturing, the polarization characteristics of illumination light have an increasing impact on the final lithography imaging quality. Therefore, excimer lasers for illumination in lithography machines The polarization characteristic control of the output laser becomes very necessary. In the lithography imaging optical system, the polarized illumination light has high spatial imaging contrast and good imaging quality, so the excimer laser light source for lithography is required to have a very high laser polarization degree. At the same time, in order to facilitate the adjustment and control of the polarization direction of the subsequent optical path, it is also necessary to keep the polarization direct...

Claims

the structure of the environmentally friendly knitted fabric provided by the present invention; figure 2 Flow chart of the yarn wrapping machine for environmentally friendly knitted fabrics and storage devices; image 3 Is the parameter map of the yarn covering machine
Login to view more

Application Information

Patent Timeline
no application Login to view more
IPC IPC(8): H01S3/10
Inventor 李慧赵江山范元媛沙鹏飞宋兴亮单耀莹王倩蔡茜玮张立佳
Owner RAINBOW SOURCE LASER RSLASER
Who we serve
  • R&D Engineer
  • R&D Manager
  • IP Professional
Why Eureka
  • Industry Leading Data Capabilities
  • Powerful AI technology
  • Patent DNA Extraction
Social media
Try Eureka
PatSnap group products

Browse by: Latest US Patents, China's latest patents, Technical Efficacy Thesaurus, Application Domain, Technology Topic.

© 2024 PatSnap. All rights reserved.Legal|Privacy policy|Modern Slavery Act Transparency Statement|Sitemap