Sub-wavelength three-dimensional spiral circular polarizing filter and manufacturing method thereof

A spiral circle and optical filter technology, applied in the field of optical filters, can solve the problems of low discrimination, difficult production, complex structure and process, etc., and achieve the effect of strong circular dichroism, simple structure and easy production

Inactive Publication Date: 2017-07-07
SUZHOU UNIV
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

To sum up, the existing technology has the problems of complex structure and process, difficult production, or low degree of differentiation

Method used

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  • Sub-wavelength three-dimensional spiral circular polarizing filter and manufacturing method thereof
  • Sub-wavelength three-dimensional spiral circular polarizing filter and manufacturing method thereof

Examples

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Effect test

Embodiment 1

[0021] Embodiment one: see figure 1 As shown, a sub-wavelength three-dimensional helical circular polarizing filter includes a silicon dioxide substrate 1, a three-dimensional helical nanocolumn 2 disposed on the silicon dioxide substrate, and a surface covering the silicon dioxide substrate and the three-dimensional helical nanocolumn. Metal thin film layer 3, the radius of the three-dimensional helical nanocolumn is r=0.95um, and the height is H 1 =2um, the period of each three-dimensional helical nanocolumn is P=1.9um, and the thickness of the metal film layer is H 2 =0.1um.

[0022] In this embodiment, the material of the metal thin film layer may be gold, silver, aluminum, copper or titanium nitride.

[0023] A method for manufacturing a sub-wavelength three-dimensional spiral circular polarizing filter, comprising the steps of:

[0024] (1) Spin-coat photoresist on a silicon dioxide substrate;

[0025] (2) Using a laser direct writing system to directly write a three...

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Abstract

The invention discloses a sub-wavelength three-dimensional spiral circular polarizing filter and a manufacturing method thereof. The manufacturing method of the circular polarizing filter includes the following steps: (1) spin-coating a photoresist on a silicon dioxide substrate; (2) ) Write the three-dimensional helical nanocolumn structure directly on the photoresist by using a laser direct writing system and develop it; The silicon dioxide substrate and the three-dimensional helical nanocolumn structure are plated with a metal thin film layer by magnetron sputtering. The invention can realize the distinction of left and right circularly polarized light, and has the characteristics of simple structure and easy manufacture.

Description

technical field [0001] The invention relates to a filter, in particular to a sub-wavelength three-dimensional spiral circular polarization filter and a manufacturing method thereof. Background technique [0002] In imaging technology, because polarization imaging technology can perform long-distance image acquisition operations in harsh environments, it has absolute advantages in suppressing background noise, improving detection distance, obtaining detailed features, and identifying target camouflage. Therefore, it has a very wide range of applications, for example: it can detect hidden or camouflaged targets; it can realize the detection and identification of sea surface and underwater targets; it can realize navigation under smoky weather conditions; It can distinguish real targets in objects; it can perform medical diagnosis such as cancer and burns; it can identify object characteristics (such as fingerprints, etc.); it can realize spaceborne or airborne remote sensing; ...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): G02B5/20
CPCG02B5/20
Inventor 王钦华胡敬佩李瑞彬赵效楠许富洋
Owner SUZHOU UNIV
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