30 degree parallel lens used for ion implanter
An ion implanter and parallel lens technology, applied in the direction of discharge tubes, electrical components, circuits, etc., can solve the problem of inability to meet the requirements of higher parallelism of the process beam, the design of the yoke and coil is not optimized, and the shape of the magnetic pole face is unreasonable. and other problems, to achieve the effect of light weight, uniformity and repeatability, and low cost
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[0026] Such as figure 1 As shown, a 30° parallel lens for an ion implanter includes an upper magnetic pole 3 and a lower magnetic pole 4 with the same structure and size and installed symmetrically up and down. An upper magnetic yoke 2 and a lower magnetic pole 4 are arranged above the upper magnetic pole 3 A lower yoke 6 is provided below, the top surface of the upper magnetic pole 3 is connected to the bottom surface of the upper magnetic yoke 2, and the bottom surface of the lower magnetic pole 4 is connected to the top surface of the lower magnetic yoke 6; the parallel lens is also provided with two intermediate Yokes 1, 5, the tops of the two middle yokes 1, 5 are connected to the bottom surface of the upper yoke 2, and the bottom ends of the two middle yokes 1, 5 are connected to the top surface of the lower yoke 6, and The upper magnetic pole 3 and the lower magnetic pole 6 are placed between the two middle yokes 1, 5; the lower magnetic pole surface of the upper ...
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