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Array substrate and manufacturing method and display device thereof

A technology for array substrates and display devices, applied in semiconductor/solid-state device manufacturing, electrical components, electric solid-state devices, etc., can solve problems such as structural defects and other structural defects of organic insulating layers

Inactive Publication Date: 2015-07-08
HEFEI XINSHENG OPTOELECTRONICS TECH CO LTD +1
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0005] The present invention aims at the problem that the organic insulating layer in the existing array substrate easily causes other structural defects, and provides an array substrate capable of avoiding other structural defects, a preparation method thereof, and a display device

Method used

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  • Array substrate and manufacturing method and display device thereof
  • Array substrate and manufacturing method and display device thereof
  • Array substrate and manufacturing method and display device thereof

Examples

Experimental program
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Effect test

Embodiment 1

[0030] Such as image 3 , Figure 4 As shown, the present embodiment provides an array substrate, which includes an insulating layer, and the opening 19 is provided in the insulating layer.

[0031] The array substrate of this embodiment may be an array substrate used in liquid crystal display devices, organic light emitting diode display devices, and the like. The array substrate includes many insulating layers for separating structures of different layers, and at least one of these insulating layers is provided with an opening 19 (or called a via hole) for electrically connecting the upper and lower structures.

[0032] Wherein, the insulating layer includes: a first insulating layer; a second insulating layer disposed on the first insulating layer, and the slope angle of the second insulating layer 12 at the opening 19 is smaller than the slope angle of the first insulating layer 11 .

[0033] More preferably, the above insulating layer is the organic insulating layer 1 ,...

Embodiment 2

[0060] This embodiment provides a method for preparing the above-mentioned array substrate, which includes:

[0061] A first insulating layer and a second insulating layer are formed, and openings are formed in the first insulating layer and the second insulating layer.

[0062] Preferably, the above steps of forming the first insulating layer and the second insulating layer, and forming openings in the first insulating layer and the second insulating layer specifically include:

[0063] forming a first insulating layer;

[0064] forming a second insulating layer;

[0065] At the same time, openings are formed through the first insulating layer and the second insulating layer.

[0066] That is to say, after the first insulating layer and the second insulating layer are formed first, openings are formed in the two layers at the same time, thereby simplifying the process. Of course, it is also feasible to form the first insulating layer first and form the opening therein, and...

Embodiment 3

[0071] This embodiment provides a display device, which includes the above-mentioned array substrate.

[0072] Specifically, the display device provided in this embodiment can be any product or component with a display function such as a liquid crystal display panel, an electronic paper, an OLED panel, a mobile phone, a tablet computer, a television set, a monitor, a notebook computer, a digital photo frame, and a navigator.

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Abstract

The invention provides an array substrate and a manufacturing method and display device thereof, belongs to the technical field of display equipment and solves the problem that an organic insulating layer of an existing array substrate is prone to causing nonconformance of other structures. The array substrate comprises insulating layers, openings are formed in the insulating layers, the insulating layers comprise a first insulating layer and a second insulating layer arranged on the first insulating layer, and the gradient angle, at the openings, of the second insulating layer is less than the gradient angle of the first insulating layer.

Description

technical field [0001] The invention belongs to the technical field of display devices, and in particular relates to an array substrate, a preparation method thereof, and a display device. Background technique [0002] Many insulating layers are arranged in the array substrate of the display device to separate different structures. The organic insulating layer made of organic insulating materials (such as polyethylene, polytetrafluoroethylene, etc.) has the advantages of simple process and low cost, so it has obtained more and more applications. [0003] However, the thickness of the organic insulating layer is often relatively large, and the slope angle at the opening is also relatively large, so the photoresist on the organic insulating layer is easy to flow and gather at the edge of the opening, and these accumulated photoresist are difficult to be completely removed. , will produce photoresist residue, which will lead to the inability to form a correct structure at the ...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): H01L27/12H01L23/528H01L21/77H01L21/768
CPCH01L27/124H01L27/1248H01L21/31138H01L27/12H01L27/1262
Inventor 张敏操彬彬
Owner HEFEI XINSHENG OPTOELECTRONICS TECH CO LTD
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