Heavy ion testing data based device proton overturning cross section retrieving method
A technique of flipping cross-sections and test data, applied in electrical digital data processing, special data processing applications, instruments, etc., can solve problems such as unconsidered, large proton fluence, total device dose effect, etc., to achieve enhanced reliability and accurate calculations Effect
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[0038] The working principle and working process of the present invention will be illustrated and explained below in conjunction with the accompanying drawings.
[0039] Such as figure 1 As shown, a device proton flip section inversion method based on heavy ion test data of the present invention comprises the following steps:
[0040] (1) Determining the proton energy; protons with different energies have different nuclear reaction models, and the proton energy is determined according to actual needs. In this embodiment, the proton energy takes any value within the range of 1MeV-1GeV.
[0041] (2) Determine the material type and thickness of the metal wiring layer and oxide layer of the device;
[0042] Protons will undergo nuclear reactions in the metal wiring layer and oxide layer of the device and produce secondary particles. When the range and LET value of the secondary particles are sufficient, they will deposit energy in the sensitive area of the device and produce si...
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