In-Situ Micro/Nano Indentation/Scratch Test Method

Abstract

The invention relates to an in-situ micro-nano indentation / scratch test platform and a test method, and belongs to the field of electromechanical integrated precision scientific instruments. An X axis precision scratch unit and a Y axis large-stroke stick-slip drive scratch assembly are assembled at the tail of a base, a Z axis macro-movement adjusting mechanism is assembled at the middle of the base, a motor driving unit is assembled at the head of the base, a precision pressing driving and displacement signal detecting unit is installed on the Z axis macro-movement adjusting mechanism, and a precision three-axis force sensor used for detecting an indentation pressing force and a normal force and a tangential force of a scratch is installed on the X axis precision scratch unit. The in-situ micro-nano indentation / scratch test platform has the advantages of compact structure, miniaturization, integration, and capability of better ensuring the assembly precision, effectively improving the overall rigidity and dynamic properties and improving the overall test precision while overcoming the defect that an existing test platform cannot be used for quantitatively detecting the normal force and the tangential force in a scratch process.

Description

technical field [0001] The invention relates to the field of precision scientific testing of electromechanical integration, in particular to an in-situ micro-nano indentation / scratch testing method. It has important scientific significance and good application prospects in the fields of iron and steel metallurgy, non-ferrous metals, inorganic non-metals, materials science, solid mechanics, biomedical engineering, aerospace and other fields. Background technique [0002] With the development of science and technology and the advancement of electron microscopy technology, the application of in-situ micro-nano mechanical testing technology has emerged. The significant advantage of in-situ indentation / scratch testing technology is that it can realize real-time online observation of the indentation / scratch process, and then study the deformation and damage mechanism of the material surface under load. The research on in-situ testing of mechanical properties of materials at home ...

AI Technical Summary

Problems solved by technology

[0003] The purpose of the present invention is to provide an in-situ micro-nano indentation / scratch test method, which solves the problem that the existing in-situ scratch test technology cannot quantitatively detect the normal force and tangential force of the scratch process, and is more Provide a good basis for research on material wear mechanism, removal mechanism, scratch force fluctuation, etc.

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