Method for electronic dynamic control of crystal silicon surface periodic micro-nano structures based on square hole assistance

Abstract

The invention relates to a method for electronic dynamic control of crystal silicon surface periodic micro-nano structures based on square hole assistance and belongs to the technical field of femtosecond laser application. The method is based on local transient electronic excitation dynamic control, and femtosecond laser linear polarization is focused through an objective lens and then is focused on the surface of a material through a square hole copper wire mesh to achieve various precise control of different surface periodic micro-nano structures; by controlling laser scanning speed and pulse energy, ablation of strip-shaped surface corrugated structures and multi-point array micro-nano structures is achieved; by controlling the relative positions of the laser polarization direction and the direction (x axis) of the edge of a square hole, direction control of the periodic micro-nano structures can be achieved; by effectively adjusting the included angle between the linear polarization laser direction and the direction (x axis) of the edge of the square hole, selective ablation of the crystal silicon surface periodic micro-nano structures is achieved. Compared with existing methods, the method has the advantages that surface processing precision and efficiency are improved effectively, and efficient and accurate form control of the surface periodic micro-nano structures is achieved.

Description

technical field [0001] The invention relates to a method for generating periodic micro-nano structures on the surface of crystalline silicon, in particular to a method for generating micro-nano periodic structures on the surface of crystalline silicon regulated by femtosecond laser based on square-hole copper mesh-assisted electronic dynamic control, which belongs to femtosecond laser application technology field. Background technique [0002] The surface micro-nanostructure of solid materials is an important factor to control the optical, wettability, chemical, biological and other characteristics of the material surface. Therefore, effective adjustment and control of the micro-nanostructure of the solid material surface has become a research focus. With the emergence of mode-locking and amplification technology, femtosecond laser technology has developed rapidly. Femtosecond laser surface micro-nano processing has become a novel and effective surface treatment technology,...

AI Technical Summary

Problems solved by technology

[0004] The purpose of the present invention is to solve the problem that the existing single mask can only realize one form of processing, and cannot realize the precise and efficient control processing of multiple forms of surface periodic micro-nano structures, and provides a square hole-based auxiliary electronic dynamic Method for generating periodic micro-nanostructures on the surface of crystalline silicon controlled by regulated femtosecond laser

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