Vibrating reed, angular velocity sensor, electronic device, moving object, and method for manufacturing vibrating reed

Abstract

The vibrating reed includes a detection unit that vibrates along the thickness direction of a piezoelectric body when detecting. The detection unit includes a first main surface and a second main surface that face each other in the thickness direction, outside surfaces, a groove that has a groove bottom at a position between the first main surface and the second main surface in a depth direction from an opening provided in the first main surface, an outside surface electrode that is formed on the outside surfaces, and an inside surface electrode that is formed on an inside surface which is opposite the outside surfaces. At least one of the outside surfaces has a non-electrode-formed area where the outside surface electrode is not provided in an area from the end surface which positioned on the second main surface side in the thickness direction to the second main surface.

Description

technical field [0001] The present invention relates to a vibrating piece, an angular velocity sensor, an electronic device, a manufacturing method of a moving body and a vibrating piece, and the like. Background technique [0002] In general, a vibrating piece used in an angular velocity sensor (gyro sensor) is known (Patent Documents 1 and 2). For example, in Patent Document 1 figure 1 Among them, when an angular velocity motion around the Y axis is applied to the vibrating piece extending in the Y direction, the driving part that performs in-plane vibration in the X direction in the X-Y plane will change to Z under the action of the Coriolis force Out-of-plane vibration in the axial direction (thickness direction of the vibrating element). This force component in the Z direction causes a movement of the detection part. Corresponding to this force component, an electric field in the X direction is generated in the detection unit based on the piezoelectric effect. An ou...

AI Technical Summary

Problems solved by technology

However, it has been clarified that, for example, when the detection part of a vibrating piece such as a gyro sensor vibrates along its thickness direction, charge loss occurs instead regardless of where the electrodes are formed.

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