Temperature uniformity measurement and control system for low-temperature vacuum microwave radiation source
A technology of microwave radiation and low-temperature vacuum, applied in temperature control, optical radiation measurement, radiation pyrometry, etc., can solve the problems of microwave radiation value deviation, microwave radiation source temperature measurement error, and damage to radiation source temperature balance, etc., to achieve Effects of improving temperature measurement accuracy and improving radiation accuracy
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[0020] The present invention will be described in detail below in conjunction with specific embodiments. The following examples will help those skilled in the art to further understand the present invention, but do not limit the present invention in any form. It should be noted that those skilled in the art can make several modifications and improvements without departing from the concept of the present invention. These all belong to the protection scope of the present invention.
[0021] Such as Figure 1-3 As shown, the embodiment of the present invention provides a non-contact temperature measurement unit 2, a two-dimensional scanning unit 3 and peripheral data acquisition control units 4 and 5, and the non-contact temperature measurement unit 2 includes a measurement unit installation shell 7 and an optical system , the optical path system includes a stray light stop 8, an aperture stop 9, a plane mirror 10, an off-axis parabolic mirror 11, a frequency modulator 12, a be...
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