Temperature Control Method in Polysilicon Production Process

A temperature control method and production process technology, applied in the direction of polycrystalline material growth, crystal growth, chemical instruments and methods, etc., can solve the problems of large time constant and pure hysteresis, time lag of control action, etc.

Active Publication Date: 2017-05-31
SIEMENS FACTORY AUTOMATION ENG
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Problems solved by technology

Because the time constant and pure lag of some closed-loop control objects are relatively large, the control effect can only take effect after a certain period of time, that is, the control effect has an obvious time lag

Method used

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  • Temperature Control Method in Polysilicon Production Process

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Embodiment Construction

[0011] In order to have a clearer understanding of the technical features, purposes and effects of the present invention, the specific implementation manners of the present invention will now be described with reference to the accompanying drawings.

[0012] According to an embodiment of the present invention, a process control method for the hydrogen reduction process of trichlorosilane in polysilicon production is provided. For ease of understanding: below, first briefly introduce the hydrogen reduction process of trichlorosilane in the polysilicon production process.

[0013] The hydrogen reduction process of trichlorosilane includes: connecting the silicon core with the electrode of the reduction furnace, and feeding the mixed gas of trichlorosilane and hydrogen into the reduction furnace. On the surface of the hot silicon core energized in the reduction furnace, trichlorosilane undergoes a hydrogen reduction reaction to form silicon and deposit it, making the diameter of ...

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Abstract

The invention provides a technical process control method. The control method comprises the following steps: measuring first technical state parameters during production process; estimating second technical state parameters, which are difficult to be measured in real time, according to the currently measured first technical state parameters and based on a fuzzy mapping model of a knowledge database; and determining set values of control variables according to the measured first technical state parameters and estimated second technical state parameters. By the scheme, relatively complete technical state conditions can be obtained in real time when partial technical state parameters are difficult to be directly measured, the set values of control variables are automatically determined according to the technical state conditions and thus the dependence on operators is reduced and the stable yield and quality are ensured.

Description

technical field [0001] The invention relates to the technical field of industrial control, in particular, the invention relates to a process control method. Background technique [0002] In the industrial production process, a closed-loop control system is usually used to realize production automation. Because the time constant and pure lag of some closed-loop control objects are relatively large, the control effect can only take effect after a certain period of time, that is, the control effect has an obvious time lag. People usually use cascade control to overcome this hysteresis. [0003] The cascade control system uses two sets of detection transmitters and two regulators. The output of the former regulator is used as the setting of the latter regulator, and the output of the latter regulator is sent to the regulating valve. The former regulator is called the main regulator, and the variable it detects and controls is called the main variable (main controlled parameter...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): C30B28/14C30B29/06
Inventor 杨晓驯张波
Owner SIEMENS FACTORY AUTOMATION ENG
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