Particle Manipulation System with Out-of-Plane Channels and Converging Elements

Abstract

A particle manipulation system uses a MEMS-based microfabricated particle manipulation device having an inlet channel, an output channel, and a movable member formed on a substrate. The movable member moves parallel to the fabrication plane, like a fluid flowing in the inlet channel. The movable member separates the target particle from the rest of the particle, diverting it into the output channel. However, at least one output channel is not parallel to the fabrication plane. The device can be used to separate target particles from non-target materials in a sample stream. Target particles can be, for example, stem cells, fertilized eggs, cancer cells, T cells, components of blood, bacteria or DNA samples. The particle manipulation system may also include microfluidic structures that focus particles of interest in specific portions of the inlet channel.

Description

technical field [0001] The present invention relates to systems and methods for manipulating small particles in microfabricated fluidic channels. Background technique [0002] Microelectromechanical systems (MEMS) are very small, often movable structures fabricated on substrates using surface or bulk photolithographic processing techniques such as those used to fabricate semiconductor devices. MEMS devices can be, for example, movable actuators, sensors, valves, pistons or switches, with feature sizes of a few micrometers to hundreds of micrometers. For example, movable MEMS switches can be used to connect one or more input terminals to one or more output terminals, all microfabricated on the substrate. The actuation means for the movable switch can be eg thermal, piezoelectric, electrostatic or magnetic. MEMS devices can be fabricated on semiconductor substrates that can manipulate particles passing the MEMS device in a fluid stream. [0003] In another example, a MEMS d...

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Problems solved by technology

Problems associated with these systems are cell damage or loss of function due to decompression, difficult and expensive disinfection procedures between samples, inability to subpopulate subpopulations according to different parameters, and owning, operating and maintaining these large and expensive Extensive training required for equipment components

For at least these reasons, the use of flow cytometry has been limited to large hospitals and laboratories, and the technology is not yet available to smaller entities

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