Laser beam combination system

Abstract

Disclosed is a laser beam combination system. The laser beam combination system respectively performs total reflection processing on an S-polarization laser and a P-polarization laser through a first total reflection module and a second total reflection module so that incident S-polarization laser and the P-polarization laser can be adjusted to be horizontal and vertical. The S-polarization laser after the total reflection processing is reflected to the second polarization module via the first polarization module and then is reflected again by the second polarization module. The P-polarization laser after the total reflection processing is retracted by the second polarization module to the optical path of the S-polarization laser reflected by the second polarization module so as to finish beam combination of the S-polarization laser and the P-polarization laser. The mean power of a single frequency multiplication laser is reduced as a frequency increases. Therefore, after the S-polarization laser and the P-polarization laser are combined, the frequency is two times that of a single laser, yet the mean power is unchanged, i.e., the single pulse energy at a high frequency is improved, and accordingly, the laser processing speed can be enhanced.

Description

technical field [0001] The invention relates to a frequency doubling laser used in a high repetition frequency state, in particular to a laser beam combining system for combining laser beams emitted by two frequency doubling lasers to increase the average output power at a high repetition frequency. Background technique [0002] Frequency doubled lasers are now widely used in the field of industrial micromachining, such as marking, drilling, scribing, welding, cutting of industrial parts, micromachining of medical devices, packaging of electronic components, three-dimensional molding of micro components, etc. In addition, it has broad application prospects in the fields of semiconductor and microelectronics, spectral analysis, optical data storage, optical disc control, atmospheric detection, photochemistry, photobiology, space optical communication and medical treatment. With the popularity of lasers in industrial applications, industrial equipment has put forward higher re...

AI Technical Summary

Problems solved by technology

Taking the frequency tripled ultraviolet laser as an example, there are many problems. For example, at a high repetition rate, the average output power of the frequency doubled laser is not high enough, which affects the industrial processing speed.

Or most of the current frequency-doubled lasers are output in a linearly polarized state. When processing some materials such as wafers, there will be X-Y axis asymmetry, which affects the processing effect.

Images