Tunable nanometer antenna and preparation method thereof

Abstract

The invention provides a tunable nanometer antenna and a preparation method thereof. The tunable nanometer antenna comprises three layers which comprise an upper layer metal structure, a middle layer single-layer grapheme and bottom substrate materials; the upper layer metal structure is a bowknot structure; the bowknot structure is formed by two isosceles trapezoids and a square. The preparation method of the tunable nanometer antenna comprises the following steps of covering the layer of single-layer grapheme on a silicon dioxide substrate through a chemical vapor deposition method; coating resist coating in a rotary mode on the single-layer grapheme; achieving structural corrosion and developing through the electron beam lithography technology; achieving evaporation of a golden layer through the vacuum electron beam evaporation technology; obtaining a final nanometer optical antenna through a lift-off process. The tunable nanometer antenna has the advantages of being small in size due to the fact that the thickness of a metamaterial structure is in the dozens of nanometer level and beneficial to application in integration optics; being high in signal intensity due to the fact that magnetic field enhance through the nanometer optical antenna can achieve more than 20000 times under illumination of incident light under specific frequency; being obvious in modulation effect.

Description

technical field [0001] The invention relates to the field of integrated optics, in particular to a tunable nanometer antenna and a preparation method thereof. Background technique [0002] Nanoantennas usually only resonate to electromagnetic waves of a specific frequency, and only when the incident light is of a specific wavelength can local field enhancement occur, so they do not have tunable properties. [0003] Most current nanoantennas can only provide electric local field enhancement, but not strong magnetic local field enhancement. [0004] At present, the tunable nanoantennas in the mid-infrared band have limited ability to adjust the response wavelength, and at the same time, the enhancement strength of the local field is low. [0005] Nano-optical antennas are composed of periodic rare metal (gold, silver, copper, etc.) nanostructures. If it is a negative number, the free electrons on the metal surface will oscillate with the electric field. When the oscillation ...

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Problems solved by technology

[0007] However, the current tunable nanoantennas have limited ability to modulate optical frequency, and the functional layers needed to achieve regulation are often difficult to obtain experimentally, and the structure is relatively bulky, which is not conducive to integration, so it is difficult to have practical applications. At the same time, the current nano-antennas in the mid-infrared band can only produce weak magnetic resonance, and the enhancement effect on the incident light wave is only dozens of times, so the generated signal is relatively weak

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