Novel quantum well barrier layer LED epitaxial growth method and epitaxial layer
A technology of epitaxial growth and barrier layer, applied in electrical components, circuits, semiconductor devices, etc., can solve problems such as reducing internal quantum efficiency
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[0053] See figure 2 The present invention uses Aixtron MOCVD to grow high-brightness GaN-based LED epitaxial wafers. Using high purity H 2 Or high purity N 2 Or high purity H 2 And high purity N 2 Mixed gas as carrier gas, high purity NH 3 As the N source, metal organic source trimethylgallium (TMGa) and triethylgallium (TEGa) are used as the gallium source, trimethylindium (TMIn) is used as the indium source, and the N-type dopant is silane (SiH 4 ), trimethyl aluminum (TMAl) is used as the aluminum source, and the P-type dopant is magnesium cerocene (CP 2 Mg), the substrate is (0001) sapphire, and the reaction pressure is between 100mbar and 800mbar.
[0054] A new type of LED epitaxial growth method of quantum well barrier layer, including processing the substrate, growing a low-temperature buffer GaN layer, growing an undoped GaN layer, growing a Si-doped GaN layer, growing an active layer MQW, and growing P-type AlInGaN The steps of layering and growing a P-type GaN layer ar...
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