Anti-fuse circuit, programming method thereof and anti-fuse structure
An anti-fuse and circuit technology, applied in circuits, electrical components, electrical solid devices, etc., can solve problems such as poor stability of polysilicon anti-fuses, and achieve the effects of reducing programming voltage, improving programming speed, and easy to punch through.
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[0033] The existing amorphous silicon antifuse is easily affected by metal electromigration characteristics, and the stability of the amorphous silicon antifuse is poor.
[0034] For this reason, the inventor of the present invention proposes a kind of antifuse circuit and antifuse structure, adopts PMOS transistor as antifuse, utilizes the hot carrier punch-through effect of PMOS transistor, makes the source region and drain region of PMOS transistor Punch through to complete the programming of the antifuse, which improves the stability of the antifuse. In addition, the width of the second part of the gate of the PMOS transistor of the present invention is smaller than the width of the first part, so that the width of the channel region (dimensions along the direction of the source region and the drain region) at the edge of the PMOS transistor is reduced. When programming , so that the source region and the drain region of the PMOS transistor are easier to punch through, whi...
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