A method for measuring the depth and shape of the subsurface damaged layer of optical materials

A technology of subsurface damage and optical materials, applied in the direction of electric/magnetic depth measurement, electric/magnetic thickness measurement, measuring device, etc., can solve the problems of complex data processing, complicated sample preparation process, and unintuitive test results, etc. High precision, strong applicability, suitable for large-scale promotion

Active Publication Date: 2016-07-13
XIAN TECH UNIV
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Problems solved by technology

[0006] The present invention provides to overcome the problems of complicated sample preparation process, unintuitive test results and complicated follow-up data processing existing in the prior art

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  • A method for measuring the depth and shape of the subsurface damaged layer of optical materials
  • A method for measuring the depth and shape of the subsurface damaged layer of optical materials
  • A method for measuring the depth and shape of the subsurface damaged layer of optical materials

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Embodiment Construction

[0028] The present invention will be further described in detail below in conjunction with the accompanying drawings and specific embodiments.

[0029] The sub-surface damage layer of the optical element includes a sub-surface crack layer and an internal stress deformation layer, and is covered by a polishing relamination layer on the non-damage substrate. Because it is below the surface, it is not easy to observe directly.

[0030] The invention provides a method for measuring the depth and shape of the subsurface damage layer of an optical material. The method controls the sample to move continuously and slowly along the vertical direction in the HF acid solution, and uses HF acid to continuously corrode the sample. , so that the corrosion degree of different positions and layers of the sample changes continuously, and the corroded section surface is obtained. The corroded cut surface is scanned with a probe-type profiler, and the depth of the subsurface damage layer of the...

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Abstract

The present invention relates to the technical field of optical precision measurement, in particular to a method for measuring the thickness of a subsurface damaged layer. Immerse in the solution; quickly remove the sample from the solution, and use a probe-type profiler to measure the corroded profile to obtain the profile curve in the direction of the crack depth and the vertical movement direction of the sample; the data obtained from the curve tends to the critical point or extreme point of steady change , and the starting point recorded during the measurement process, and the height difference between these two points or the height difference projected on the original surface, that is, the depth D of the damaged layer on the subsurface of the sample; 3D shape observation. The method of the invention is simple, fast and accurate, can simultaneously measure the depth of the subsurface layer and the three-dimensional shape, has high test precision, low cost, strong intuitiveness and low requirements for test equipment.

Description

technical field [0001] The invention relates to the technical field of optical precision measurement, in particular to a method for detecting the depth and shape of a subsurface damaged layer of a continuously corroded optical material, which is used for measuring various optical elements ranging from planes to spherical surfaces and aspheric surfaces. This method can amplify the subsurface damage of optical materials, and can obtain the continuously changing subsurface crack depth curves on the subsurface polishing layer, damage layer and substrate, and can realize the measurement of the depth of the tiny subsurface damage layer caused by ultra-precision grinding. Background technique [0002] Quantitatively determining the depth and distribution of subsurface damage in optical materials plays an extremely important role in studying the damage formation mechanism and optimizing processing parameters. Furthermore, controlling the depth of the damaged layer and improving the ...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): G01B7/26G01B7/06G01B11/24
Inventor 田爱玲王春慧田玉珺王红军朱学亮刘丙才
Owner XIAN TECH UNIV
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