Manufacturing method of all-printed electronic carbon dioxide thin-film SAW (Surface Acoustic Wave) sensor
A carbon dioxide, gas thin film technology, applied in the direction of using material absorption and weighing, can solve the problems of complex process and high cost of gas thin film SAW sensor, and achieve the effect of material saving, accurate sensing function and cost reduction
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[0029] The specific implementation steps are as follows:
[0030] 1. Selection of piezoelectric substrate: ST-cut quartz with a temperature coefficient of zero is selected as the piezoelectric substrate in the present invention.
[0031] The ST-cut quartz substrate with zero temperature coefficient prevents the influence of temperature on the measurement. Its wave velocity is 3159m / s; the electromechanical coupling coefficient is 0.16%. In order to reduce unnecessary loss during SAW transmission, it is necessary to grind, clean and polish the surface of the substrate.
[0032] 2. Electrode design and printing: The present invention uses a dual-channel delay line structure and a uniform interdigitated electrode structure. In the dual-channel structure, the SAW propagation path of one channel is not processed for reference and comparison; while in the other A sensitive film is printed on the channel to detect gas, and finally the two signals are output through the mixer. ...
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