Laser double-shaft differential confocal Brillouin-Raman spectrum measurement method and device

Abstract

The invention belongs to the technical field of microscopic spectral imaging, and relates to a laser double-shaft differential confocal Brillouin-Raman spectrum measurement method and device. The laser double-shaft differential Brillouin-Raman spectrum measurement method and device fuse double-shaft differential confocal microscopy and spectrum detection technologies, and use a segmentation focal spot differential detection method to realize precise imaging of geometric position, and Raman spectrum detection and Brillouin spectrum detection technologies are combined to realize united detection on a system high spatial resolution graph spectrum. The laser double-shaft differential Brillouin-Raman spectrum measurement method and device have three modes of three-dimensional tomographic geometric imaging, spectrum detection and micro-region spectrum tomographic imaging, and use the characteristics of complementary advantages of a confocal Raman spectrum detection technology and a confocal Brillouin spectrum detection technology to provide a new solution channel for comprehensive detection of morphology, properties, texture, stress and other parameters of a sample, and have wide application prospect in the fields of biomedicine, high energy production, material chemistry and the like.

Description

technical field [0001] The invention belongs to the technical field of microspectral imaging, combines biaxial differential confocal microscopic technology and spectral detection technology, and relates to a laser biaxial differential confocal Brillouin-Raman spectral measurement method of "combining maps and spectra into one" And the device can be used for micro-area multi-spectrum, multi-performance parameter comprehensive testing and high-resolution imaging of samples. technical background [0002] The phenomenon of light emission widely exists in the interaction process between light and particles, that is, when a beam of light passes through a medium, the medium particles are affected by the light wave, transition from one quantum state to another quantum state, and radiate scattered waves at the same time, different The way of energy level transition produces Rayleigh, anti-Stokes and Stokes scattering respectively, and light scattering is usually divided into Rayleigh...

AI Technical Summary

Problems solved by technology

[0010] (1) The spatial resolution is not high, only about 1 μm

The intensity signal of the Raman spectrum excited by the laser is very weak, which is about 6 orders of magnitude lower than the intensity of the abandoned sharp beam. Therefore, in order to detect the extremely weak Raman signal, the aperture of the pinhole of the confocal Raman spectroscopy detection system is usually exist It is about 100 μm, which is much larger than the pinhole aperture value of the existing confocal microscope of about 10 μm. Has not changed fundamentally over the years

[0011] (2) Poor ability to capture the Raman spectrum excited by the focal point

Confocal Raman spectroscopy detection system, due to the insensitive intensity response at the extreme point, it is difficult to capture the Raman spectrum information of the sample excited at the focal point, thus limiting the spatial resolution of the existing confocal Raman spectroscopy detection ability;

[0012] (3) Long detection time and large system drift

Because the confocal Raman spectrum signal is very weak, the detector needs to be integrated for a long time (often several hours) when performing spectral imaging. The drift of the optical system and the sample worktable often causes the sample to defocus, which in turn reduces the confocal Raman. Spatial resolution of spectral detection;

[0013] (4) The stray light of the sample is strong, which affects the signal-to-noise ratio of the Raman spectroscopy detection instrument

However, because the differential confocal Raman spectroscopy test method adopts a dual-path physical pinhole structure, the structure of the differential confocal measurement system is relatively complicated, and the requirements for the defocus position are strict, and the installation and adjustment are difficult, which increases the error source; This method does not use the Brillouin scattering spectrum that contains rich sample information, and is still limited in the testing of materials such as elasticity and piezoelectric properties; in addition, due to the limitation of the principle of the differential confocal microscope system, it is usually difficult to balance the resolution and working distance. and field of view

[0015] Usually the intensity of the Raman spectrum scattered by the sample is 10 times the intensity of the reflected Rayleigh beam. -3 ~10 -6 times, and the existing spectral detection instrument discards the Rayleigh beam stronger than the Raman scattered light

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