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Method for coating inner wall of electron-enhanced plasma discharge tube

A plasma and discharge tube technology, which is applied in the field of plasma discharge tube inner wall coating, can solve the problems of non-metallic tube inner wall coating, slow deposition speed, unsuitable for straight long thin tubes and special-shaped tubes, etc. Fast, simple equipment, high plasma density

Inactive Publication Date: 2014-07-30
BEIHANG UNIV
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0003] 1. Purpose: The purpose of the present invention is to provide a method for electron-enhanced plasma discharge tube inner wall coating in view of the above-mentioned deficiencies and defects in the background technology, so as to solve the problem that the existing methods are not suitable for straight long thin tubes and special-shaped tubes , can only be used to deposit pipes with a diameter greater than 10mm, the deposition speed is slow and can only be coated on the inner wall of metal pipes but not on the inner wall of non-metallic pipes

Method used

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  • Method for coating inner wall of electron-enhanced plasma discharge tube
  • Method for coating inner wall of electron-enhanced plasma discharge tube
  • Method for coating inner wall of electron-enhanced plasma discharge tube

Examples

Experimental program
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Effect test

Embodiment 1

[0028] Embodiment 1: Taking the molybdenum coating on the inner wall of the pipe as an example, a straight pipe with an inner diameter of 4 mm and a length of 100 mm is selected as the pipe to be treated. The straight pipe is made of insulating material quartz. The insulating short tube is made of quartz. take figure 1 In the device, the specific steps of the method are as follows:

[0029] Step 1: cleaning the inner wall of the tube 13 to be treated before coating: ultrasonically clean the tube to be treated with absolute ethanol for 10 minutes, and then dry the inner wall of the tube with an air pump.

[0030] Step 2: the coating device is connected, one end of the tube 13 to be treated is connected to the insulating cover 14 with a hole in the center of the end face, the insulating cover 14 is placed on the cathode target platform 16 supported by the workbench support 17, and the insulating ceramic 19 is located on the workbench support Between the vacuum chamber and the...

Embodiment 2

[0036] Embodiment 2: Taking the diamond-like carbon film (DLC) coating on the inner wall of the pipe as an example, a straight pipe with an inner diameter of 4mm and a length of 100mm is selected as the pipe to be treated. The straight pipe is made of insulating material quartz. The insulating short tube is made of quartz. take figure 2 device in figure 2 The vacuum chamber part of the device and figure 1 Consistent, the specific steps of the method are as follows:

[0037] Step 1: cleaning the inner wall of the tube 13 to be treated before coating: ultrasonically clean the tube to be treated with absolute ethanol for 10 minutes, and then dry the inner wall of the tube with an air pump.

[0038] Step 2: The coating device is connected, and the parts in the vacuum chamber are connected with the figure 1 The same as shown, the part outside the vacuum: the gas in the gas cylinder 22 passes into the vacuum chamber 26 through the particle feeding pipeline 25 , and the partic...

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Abstract

The invention provides a method for coating the inner wall of an electron-enhanced plasma discharge tube. The method comprises the following six steps: 1, performing cleaning treatment on the inner wall of the tube to be treated before coating; 2, assembling a device for coating the inner wall of the electron-enhanced plasma discharge tube; 3, completing vacuum supply to a vacuum chamber, introducing an inert gas via an inert gas feed pipeline and feeding the inert gas into an insulating cover via the tube to be treated, and controlling the flow of the inert gas introduced into the vacuum chamber by use of a quality / flow controller; 4, providing negative impulse voltage to a cathode target table by virtue of external power supply and setting predetermined voltage value and duty ratio, thereby completing the cleaning of the inner wall of the tube; 5, introducing gaseous-state or vapor-state particles for deposition via a particle feed pipeline, providing the negative impulse voltage to the cathode target table by virtue of the external power supply and setting predetermined voltage value and duty ratio, thereby completing the coating of the inner wall of the tube; and 6, completing degassing of the vacuum chamber, taking out the tube to be treated and then completing the coating of the inner wall of the tube. The method has practical value in the surface material modification field.

Description

technical field [0001] The invention belongs to the technical field of material surface modification in the field of low-temperature plasma physics and chemistry, and relates to a method for electronically enhancing the inner wall coating of a plasma discharge tube. It can be used for internal surface modification of metal and non-metallic capillary tubes, military gun barrels, offshore drilling and natural gas transmission systems, pipelines and valves for transporting corrosive materials, automotive engine cylinders and piston components, etc. Background technique [0002] In industrial production, there is a large demand for coating the inner wall of metal pipes, especially for tubular workpieces, such as oil pump barrels in the petroleum industry, chemical pipelines, oil pipelines, and military fields, especially naval guns on naval ships. The inner walls of gun barrels and torpedo tubes that work in harsh environments are in urgent need of strengthening treatment, and o...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): C23C14/38B05D7/22
Inventor 李刘合许亿罗辑
Owner BEIHANG UNIV
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