Ultra-high purity gas heat exchanger and implementation method thereof

Abstract

The invention discloses an ultra-high purity gas heat exchanger and an implementation method thereof. The ultra-high purity gas heat exchanger comprises a shell filled with water inside, a left heat exchange pipe supporting and fixing plate, a right heat exchange pipe supporting and fixing plate, an ammonia circulation coil component, a feed pipe, a discharge pipe, a hot-water circulation coil component, a plurality of plug-in electric heaters and a thermalcouple. A hot-water inlet is formed in the upper end of the hot-water circulation coil component, a hot-water outlet is formed in the lower end of the hot-water circulation coil component, the thermalcouple is connected with a PID (piping and instruments diagram) controller in an explosion-proof tank on the outer surface of the shell, and the PID controller is connected with the plug-in electric heaters. The invention further discloses an implementation method of the Ultra-high purity gas heat exchanger. The ultra-high purity gas heat exchanger and the implementation method thereof have the advantages of simple structure, low cost and capability of being operated for a long time in succession, evaporation is quite stable, electrical heating and hot water of waste heat are combined for heating, energy conservation and environment protection are achieved and the like.

Description

technical field [0001] The invention relates to liquid vaporization technology, in particular to an ultra-high-purity gas heat exchanger and its realization method. Background technique [0002] Ultra-high-purity gas refers to a gas with a purity of less than one part per billion of oxygen. Ultra-high-purity gas plays a huge role in various fields such as the electronics industry, petrochemical industry, medicine, and national defense. The application fields are mainly in integrated circuit manufacturing, new electronic Components and other fields. Based on the importance of ultra-high-purity gases in the electronics industry and the restraint of cutting-edge technologies in the world, my country clearly supports the research and industrialization of domestic ultra-high-purity gases. [0003] In the prior art, the preparation of ultra-high-purity gas is generally realized by distillation towers. Distillation towers are divided according to the number, such as single tower c...

AI Technical Summary

Problems solved by technology

[0006] 1. The heat transfer efficiency is low and the energy loss is large, which affects the normal use of the heat exchanger;

[0007] 2. Poor safety performance;

[0008] 3. The working time is short, the amount of vaporization is unstable, and the production efficiency is low;

[0009] 4. The service life is low, because the temperature is difficult to control and the purity of the gas is difficult to guarantee;

[0010] 5. No insulation structure, large heat loss

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