On-line microelectrode manufacturing method

Abstract

The invention provides an on-line microelectrode manufacturing method. The method includes the steps that a microelectrode with the diameter of about 10 micrometers is manufactured in an on-line mode according to the on-line line electrode manufacturing technology, a cylindrical reverse copying block is manufactured according to the on-line electric spark milling technology, and the electrode is further manufactured according to the reverse copying technology. By the adoption of the on-line reverse copying electrode manufacturing technology, secondary clamping errors are avoided; because the revere copying block is cylindrical, influence of flatness errors of a square reverse copying block on the diameter and shape of the microelectrode is avoided. According to the method, the electrode is further machined on the basis that the electrode is machined according to the on-line electrode grinding technology, and then a microelectrode with the diameter smaller than 10 micrometers can be obtained.

Description

technical field [0001] The invention belongs to the field of ultra-precision electric spark micromachining, and in particular relates to an on-line manufacturing method of a microelectrode. Background technique [0002] In micro-EDM, the on-line fabrication of micro-electrode is the key technology of EDM micro-machining. The traditional electrode manufacturing method uses thin metal wires, which are installed on the machine tool, or the electrode is made by machining methods such as turning, and then clamped on the machine tool for the second time. This method inevitably produces the rotation error of the electrode and the perpendicularity to the workpiece. error. In recent years, people have used the online grinding technology of wire electrodes to make fine electrodes online. Japanese scholar Takahisa Masozawa used this method to realize the online production of fine electrodes with a minimum diameter of φ2.5 μm. Harbin Institute of Technology in China adopted this method...

AI Technical Summary

Problems solved by technology

In recent years, people have used the online grinding technology of wire electrodes to make fine electrodes online. Japanese scholar Takahisa Masozawa adopted this method to realize the online production of fine electrodes with a diameter of φ2.5μm. Harbin Institute of Technology in China adopted this method. Micro electrodes with a diameter of φ15μm have been developed, but there are still great difficulties for micro electrodes with a diameter of less than φ10μm

Through this method, the Laser Fusion Research Center of the Chinese Academy of Sciences has successfully and stably produced a micro-electrode with a diameter of φ10 μm. However, there are still some difficulties in directly using this method to fabricate a micro-electrode with a diameter of less than 10 μm.

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