Capacitive element, capacitor array, and a/d converter

Abstract

The invention provides a capactive element, a capatictor array and an A / D coverter. A capacitive element includes first electrodes and second electrodes that are alternately arranged in a concentric form. Each of the first electrodes and the second electrodes is formed with closed loop form, in at least one wiring layer provided on or above a substrate.

Description

technical field [0001] Embodiments discussed herein relate to capacitive elements, capacitor arrays and A / D converters. Background technique [0002] In recent years, A / D converters are widely used in various fields. More specifically, as A / D converters with relatively high resolution, successive approximation type A / D converters and delta-sigma (delta-sigma) A / D converters are known. Such A / D converters include, for example, switched capacitor circuits, and are widely used in the form of CMOS (Complementary Metal Oxide Semiconductor) integrated circuits. [0003] As performance indicators of the A / D converter, there are, for example, linearity, offset, and gain errors. However, the advantages of the conversion characteristics of the A / D converter largely lie in the matching of capacitive elements, the control of voltage dependence, and the like in most cases. Therefore, in order to realize an A / D converter with high conversion accuracy, it is preferable to apply a capaci...

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Problems solved by technology

[0039] Among capacitive elements, PIP capacitors have the problem that they cannot be formed by standard logic manufacturing processes, thus requiring additional manufacturing steps, which increases manufacturing costs

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