Ultrahigh numerical aperture lithography imaging polarization compensation apparatus and method thereof
A compensation device and numerical aperture technology, applied in the field of high numerical aperture lithography imaging polarization compensation device, can solve problems such as the inability to meet lithography imaging requirements, achieve resolution and CDU requirements, accurately control polarization state, and improve lithography effect of effect
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[0021] An ultra-high numerical aperture lithography imaging polarization compensation device and method for a lithography device according to a specific embodiment of the present invention will be described in detail below with reference to the accompanying drawings. However, the present invention should be understood as not limited to such embodiments described below, and the technical idea of the present invention can be implemented in combination with other known technologies or other technologies having the same functions as those known technologies.
[0022] In the following description, in order to clearly show the structure and working method of the present invention, many directional words will be used to describe, but "front", "rear", "left", "right", "outer", "inner" should be used Words such as ", "outward", "inward", "upper" and "lower" are to be understood as convenient terms, and should not be understood as restrictive terms. In addition, "X direction" should b...
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