Sub-wavelength super-resolution digital holographic imaging system based on microspheres

Abstract

The invention relates to a sub-wavelength super-resolution digital holographic imaging system based on microspheres. The sub-wavelength super-resolution digital holographic imaging system based on microspheres comprises an automatic hologram collecting and controlling module, a digital hologram recording module, a digital hologram preprocessing module, a hologram numerical value analyzing and processing module and a phase contrast image displaying module, wherein the exposure time and the image collecting speed are controlled by utilizing Labview software through the automatic hologram collecting and controlling module; the digital hologram recording module comprises a laser device, a to-be-tested sample and an optical device for forming a hologram, and the to-be-tested sample performs microsphere spreading at the early stage; acetone or water can be used for diluting microspheres; a small amount of diluted microsphere solution is dropped onto the to-be-tested sample by a drip tube, and stands until acetone or water is volatilized completely so as to complete the single-layer spreading of the microspheres. According to the invention, micro fine structures are amplified twice by adopting the microspheres and a microobjective, so that the micro nano structure can be subjected three-dimensional phase contrast imaging; the horizontal resolution can break through the diffraction limit, and the system is simple in structure, and is low in cost.

Description

technical field [0001] The sub-wavelength super-resolution digital holographic imaging system based on microspheres belongs to the field of high-resolution imaging and digital holography technology, and relates to a super-resolution digital holographic imaging device, especially a sub-wavelength superresolution system based on microspheres to collect near-field evanescent waves. High resolution digital holographic imaging device. Background technique [0002] With the rapid development of nanoscience and microelectronics technology, micro-processing technology and micro-nano components have been widely used. In order to quantitatively detect and evaluate micro-structures, there is an urgent need for high-precision micro-nano structure detection technology. Compared with traditional optical imaging methods, digital holographic microscopic imaging has the unique advantages of full field of view, non-contact, non-destructive and quantitative detection, and is a promising micros...

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Problems solved by technology

However, Wang and Hao et al. have combined microsphere superlenses with ordinary optical microscopes to obtain sub-wavelength lateral resolution, but cannot detect the axial information of the object, that is, these methods cannot reflect the three-dimensional shape information of the object.

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