A digital power supply device for the control system of magnetic levitation molecular pump

Abstract

A digital power supply device for a magnetic suspension molecular pump control system mainly comprises an AC / DC converter module, a self-powered module, a DSP control module, a low voltage DC / DC module, a CAN communication interface module and an HMI man-machine interface module. When the digital power supply device runs, output of a voltage sensor and a current sensor is adopted to serve as feedback according to a given voltage value through the DSP control module, switch devices in a high voltage DC / DC module and the AC / DC converter module are controlled through PWM, and a double closed loop control system of current and voltage is formed, voltage output of both the AC / DC converter module and the high voltage DC / DC module serves as input of a power amplification power supply of a magnetic bearing and the low voltage DC / DC module, and output of the low voltage DC / DC module serves as a control power supply of a magnetic bearing system. When an external power grid fails, the high voltage DC / DC module performs voltage conversion by means of feedback energy of a motor and continues to provide electric energy for the magnetic bearing system, and a power down protection function of the magnetic bearing is achieved.

Description

technical field [0001] The invention relates to a digital power supply device for a magnetic levitation molecular pump control system, which can provide the required power supply for the magnetic bearing system and the motor control system in the magnetic levitation molecular pump system. The form of UPS or permanent magnet motor energy feedback can provide real-time compensation for the power supply of the magnetic bearing system, which is especially suitable for high-speed magnetic levitation molecular pump control systems that require high reliability of power supply. In addition, this digital power supply unit is also suitable for other magnetic bearing control systems. Background technique [0002] The ultra-high vacuum system is an indispensable key instrument and equipment for the development of my country's cutting-edge scientific instruments, core devices in the national defense field, and high-tech industrial process equipment, and is a key technical bottleneck res...

AI Technical Summary

Problems solved by technology

[0005] The technical problem of the present invention is to overcome the defects that the switching power supply system of the existing maglev molecular pump system cannot effectively compensate the nonlinear and time-varying parameters of the switching converter and does not have the function of industrial bus communication, and proposes a DSP is the control core, digital power supply with power failure compensation based on permanent magnet motor energy feedback and industrial field bus communication function

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