Method, system and device for control system simulation testing in semiconductor manufacturing process

Abstract

The invention discloses a method, system and device for control system simulation testing in a semiconductor manufacturing process. The method comprises the steps of generating simulation devices; setting attribute information, data types and communication protocols of the simulation devices, setting parameters and communication instructions and simulation operations between the simulation devices, setting coupling conditions, and establishing a device simulation model according to the coupling conditions; carrying out the simulation operations in the simulation model, and obtaining test results. According to the method, system and device for control system simulation testing, testing efficiency is improved, and testing risks are reduced.

Description

technical field [0001] The invention relates to the field of semiconductor equipment manufacturing technology, in particular to a simulation test method, system and device of a control system for automatically controlling equipment in the semiconductor manufacturing technology. Background technique [0002] In the manufacturing process of semiconductor equipment, as the efficiency requirements and process requirements in the manufacturing process are getting higher and higher, people are increasingly using control systems to automatically control various processes in the manufacturing process. [0003] Among them, generally, the control system is responsible for controlling various hardware devices of the entire manufacturing process, and these hardware devices have different functions, different operation processes, and different communication methods and contents with the control system. [0004] The control system sends control instructions to each hardware device, and ea...

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Problems solved by technology

[0006] However, because in the semiconductor device manufacturing process, the test process involves multiple hardware devices, the test is very complicated

First of all: when testing, once a problem occurs, it is not easy to judge whether it is a hardware problem or a software problem; second: it is sometimes difficult to implement the fault tolerance test scenario for hardware device errors, and some of them are processing logic when the hardware is damaged. These are implemented by hardware devices that will destroy the device

[0007] Moreover, during the installation process of semiconductor equipment manufacturing process, hardware equipment installation and control system software programming are carried out at the same time, and often the control system is completed earlier than the hardware equipment installation. If the control system waits for the hardware equipment installation to be completed before testing, it will waste a lot time

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