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Trapezoid metal dielectric film broadband pulse compressed grating

A metal medium, broadband pulse technology, applied in the direction of diffraction grating and so on

Inactive Publication Date: 2014-04-16
SHANGHAI INST OF OPTICS & FINE MECHANICS CHINESE ACAD OF SCI
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

As far as we know, no one has proposed a wide-spectrum, wide-angle spectrum metal dielectric film reflective polarization beam splitter grating for the 1053 nm band

Method used

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  • Trapezoid metal dielectric film broadband pulse compressed grating
  • Trapezoid metal dielectric film broadband pulse compressed grating
  • Trapezoid metal dielectric film broadband pulse compressed grating

Examples

Experimental program
Comparison scheme
Effect test

Embodiment 1

[0028] A trapezoidal metal dielectric film broadband pulse compression grating for a central wavelength of 800 nanometers is composed of a quartz substrate, a metal layer 8, a matching layer 7 composed of two dielectric films, and a trapezoidal grating ridge 4. The trapezoidal grating 4 has a period of 574.7 nanometers, a duty ratio of 0.43, a grating ridge base angle of 75°, and an outer layer of 1SiO 2 (refractive index 1.45) thickness 100 nm, interlayer 2HfO 2 (refractive index 1.96) layer thickness 149 nm, inner layer 3SiO 2 Thickness 57 nm. The outer layer 5 of the matching layer 7 is HfO 2 , with a thickness of 119 nm; the inner layer 6 is SiO 2 , with a thickness of 81 nm. The gold layer 8 has a thickness of 200 nm. Such as figure 2 , when the incident angle is 53°, for the incident light of 800 nm, the -1 order diffraction efficiency of the grating TE is the highest, greater than 97%, and in the wavelength range of 700-900 nm, the -1 order diffraction efficiency...

Embodiment 2

[0030] A trapezoidal metal dielectric film broadband pulse compression grating for a central wavelength of 800 nanometers is composed of a quartz substrate, a metal layer 8, a matching layer 7 composed of two dielectric films, and a trapezoidal grating ridge 4. The period of the trapezoidal grating 4 is 555 nanometers, the duty ratio is 0.27, the bottom angle of the grating ridge is 89°, and the outer layer 1 is SiO 2 (refractive index 1.45) thickness 110 nm, middle layer 2 is TiO 2 (refractive index 2.12) layer thickness 150nm, inner layer 3 is SiO 2 Thickness 60 nm. The outer layer 5 of the matching layer 7 is TiO 2 , with a thickness of 120 nm; the inner layer 6 is SiO 2 , with a thickness of 80 nm. The gold layer 8 has a thickness of 150 nm. Such as Image 6When the incident angle is 53°, for the incident light at 800 nm, the -1 order diffraction efficiency of the grating TE is the highest, greater than 97%, and in the wavelength range of 700-952 nm, the -1 order dif...

Embodiment 3

[0032] A trapezoidal metal dielectric film broadband pulse compression grating for a central wavelength of 800 nanometers is composed of a quartz substrate, a metal layer 8, a matching layer 7 composed of two dielectric films, and a trapezoidal grating ridge 4. The period of the trapezoidal grating 4 is 555 nanometers, the duty ratio is 0.62, the bottom angle of the grating ridge is 60°, and the outer layer 1 is SiO 2 (refractive index 1.45) thickness 50 nm, middle layer 2 is TiO 2 (refractive index 2.12) layer thickness 150nm, inner layer 3 is SiO 2 Thickness 60 nm. The outer layer (5) of the matching layer 7 is TiO 2 , with a thickness of 120 nm; the inner layer 6 is SiO 2 , with a thickness of 80 nm. The gold layer 8 has a thickness of 100 nm. Such as Figure 8 When the incident angle is 53°, for the incident light at 800 nm, the -1 order diffraction efficiency of the grating TE is the highest, greater than 97%, and in the wavelength range of 700-920 nm, the -1 order ...

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Abstract

A trapezoid metal dielectric film broadband pulse compressed grating is characterized in that the grating is integrally formed through a matching layer and a trapezoid grating ridge, wherein the matching layer is composed of a quartz substrate, a metal layer and two layers of dielectric films, the trapezoid grating ridge is composed of three layers of dielectric films, and the outermost layer is made of SiO2. The cycle of the trapezoid grating is 490-640 nanometers, the duty ratio is 0.2-0.7, the base angle of the grating ridge is 60-89 degrees, the middle layer of the grating ridge is a high-refractive-index layer, and the inner layer and the outer layer of the grating ridge are low-refractive-index layers made of SiO2; the outer layer of the matching layer is a high-refractive-index layer, and the inner layer of the matching layer is a low-refractive-index layer; the thickness of the metal layer is larger than 50 nanometers. The trapezoid metal dielectric film broadband pulse compressed grating can be used as a pulse compressed grating of a high-power ultra-short pulse laser system with the central wavelength of 800 nanometers.

Description

technical field [0001] The invention relates to a high-power laser system, in particular to a trapezoidal metal dielectric film broadband pulse compression grating for a center wavelength of 800 nanometers. Background technique [0002] High-power ultrashort pulse lasers based on chirped pulse amplification have a wide range of application requirements in the fields of laser processing and research on the interaction between light and matter. Reflective gratings for stretching and compressing femtosecond laser pulses play an important role in chirped pulse amplification systems. A pulse compression grating must have as high a diffraction efficiency as possible, an anti-laser damage threshold and a sufficiently wide operating bandwidth. The earliest pulse compression grating is a gold-plated grating, which has a relatively wide operating bandwidth, but it is difficult to obtain high diffraction efficiency and anti-laser damage threshold due to its strong absorption character...

Claims

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Application Information

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IPC IPC(8): G02B5/18
Inventor 晋云霞关贺元刘世杰易葵邵建达
Owner SHANGHAI INST OF OPTICS & FINE MECHANICS CHINESE ACAD OF SCI
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