Rapid photo detector
A photodetector, fast technology, applied in the direction of electric solid-state devices, circuits, electrical components, etc., can solve problems such as complex structure design, elimination of slow carriers, and influence on response speed, so as to increase process cost, simple and effective way, Eliminates the effect of generating conditions
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[0019] Such as figure 1 As shown, the photodetector of this example is fabricated using a vertical CMOS process, in which the photodiode is fabricated on an N+ substrate 101 with a vertical structure, as the cathode of the phototube, and an N- epitaxial layer 102 above the substrate. In the epitaxy, a layer of P+ injection zone 103 is used as the anode of the photocell, and an anti-reflection film 104 is covered on the P+ injection zone 103 to improve the light absorption efficiency of the photocell. The anode metal electrode 105 and the cathode metal electrode 106 are respectively Manufactured on the surface and back of the phototube, the metal covering area 107 and the anode metal electrode 105 adopt the same metal version, covering the photodiode without any potential. The amplifying circuit is composed of a number of NMOS tubes 108 and PMOS tubes 109, which are interconnected with photodiodes through metal.
[0020] Such as figure 2 Shown is the layout of the photodetector o...
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