Substrate transportation equipment and transportation method

A technology of transportation equipment and transportation methods, applied in transportation and packaging, conveyor objects, electrical components, etc., can solve problems such as increasing overall operating costs and increasing cycle time, reducing handling volume, reducing production cycle time, and providing capacity. Effect

Active Publication Date: 2016-05-18
TCL CHINA STAR OPTOELECTRONICS TECH CO LTD
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

[0004] The object of the present invention is to provide a substrate transportation equipment and transportation method to overcome the above-mentioned problems in view of the defects that the existing substrate method will increase the overall operating cost and increase the cycle time

Method used

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  • Substrate transportation equipment and transportation method
  • Substrate transportation equipment and transportation method
  • Substrate transportation equipment and transportation method

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Embodiment Construction

[0027] The present invention will be described in detail below in conjunction with the accompanying drawings and specific embodiments.

[0028] In order to overcome such as figure 1 In the prior art, the handling machine 100 needs to carry the cassette 200 multiple times during the substrate production process. The present invention improves the original way of setting the processing chambers in parallel, so that the number of times the cassette 200 is transported by the transporter 100 is minimized during the transport process.

[0029] Such as figure 2 Shown is a schematic structural view of the first embodiment of the substrate transportation equipment of the present invention. In this embodiment, the original processing chambers arranged in parallel are changed to a mixed series form, that is, the first processing chamber 300 and the second processing chamber 400 are opposite to each other. The moving direction of the conveyor 100 is vertically arranged, the first proce...

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PUM

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Abstract

A substrate transporting device, comprising a cartridge (200) for loading a substrate, and a crane (100) for transporting the cartridge; a first handling chamber (300) and a second handling chamber (400) for handling the cartridge are sequentially disposed in a direction perpendicular to the crane moving direction; a first conveyer belt (501) for moving the cartridge from the first handling chamber to the second handling chamber is disposed between the first handling chamber and the second handling chamber. The crane only needs to transport a cartridge to an input port without further crane handling in the flow, thus reducing transport workload, shortening a substrate production cycle, and improving productivity. Also provided is a substrate transporting method.

Description

technical field [0001] The present invention relates to substrate technology, and more specifically, to a substrate transportation device and transportation method. Background technique [0002] In the process of substrates, such as TFT-LCD substrates, different processes need to be processed in different processing chambers, such as coating, exposure, etching, photoresist removal, etc., all need to be processed in different processing chambers. At present, the industry adopts the following methods for the handling of substrates between processing chambers: figure 1 The way. Each processing chamber is set parallel to the moving direction of the transporter. After the substrates to be processed are loaded by the cassette 200, they are transported to the first entrance 301 of the first processing chamber 300 by the transporter 100 (crane). A processing chamber 300 is processed, and the processed cassette 200 is output from the first outlet 302 of the first processing chamber...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): H01L21/677
CPCH01L21/67736H01L21/6773H01L21/67733
Inventor 陈增宏吴俊豪林昆贤汪永强杨卫兵齐明虎李晨阳子杨国坤蒋运芍舒志优
Owner TCL CHINA STAR OPTOELECTRONICS TECH CO LTD
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